American Air Liquide, Inc.

L'air Liquide Société Anonyme Pour L'etude Et L'exploitation Des Procédés Georges Claude

Air Liquide Electronics U.S. LP

Andrey V Korolev

Clément Lansalot-Matras

Jean-Marc Girard

Ziyun Wang

Zhiwen Wan

Christian Dussarrat

Venkateswara R Pallem

Ashutosh Misra

Vincent M Omarjee

Clement Lansalot-Matras

Claudia Fafard

Ashulosh Misra

Disclosed are processes for the use of bis-ketoiminate copper precursors for the deposition of copper-containing films via Plasma Enhanced Atomic Layer Deposition (PEALD) or Plasma Enhanced Chemical Vapor Deposition (PECVD).

Bis-ketoiminate copper precursors for deposition of copper-containing films and methods thereof

Si(OEt)[CH&#x2014;Si(OEt)]compounds are synthesized by reacting a Grignard reagent having the formula Si(OEt)(CHMgCl) with a quenching agent having the formula Si(OEt)Cl.

Synthesis method for carbosilanes

Disclosed are metal-containing precursors having the formula Compound (I) wherein: &#x2014;M is a metal selected from Ni, Co, Mn, Pd; and &#x2014;each of R-, R, R, R, R, R, R, R, R, and Rare independently selected from H; a C1-C4 linear, branched, or cyclic alkyl group; a C1-C4 linear, branched, or cyclic alkylsilyl group (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic alkylamino group; or a C1-C4 linear, branched, or cyclic fluoroalkyl group. Also disclosed are methods of synthesizing and using the disclosed metal-containing precursors to deposit metal-containing films on a substrate via a vapor deposition process. 

Heteroleptic (allyl)(pyrroles-2-aldiminate) metal-containing precursors, their synthesis and vapor deposition thereof to deposit metal-containing films

A SiH[CH&#x2014;Si(OEt)]carbosilane compound is synthesized by reacting a Grignard reagent having the formula Si(OEt)(CHMgCl) with a quenching agent having the formula SiHCl.

Synthesis methods for carbosilanes

Disclosed are precursors having a pyrrolecarbaldiminates ligand and methods of synthesizing the same. The pyrrolecarbaldiminates ligand may be substituted.

Heteroleptic pyrrolecarbaldimine precursors

Disclosed are synthesis methods to produce copper bis-ketoiminate and copper bis-ketiminate compounds.

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Newark, DE, United States of America

Andrey V Korolev