Rohm & Haas Electronic Materials LLC

Andrey Rudenko

Gerhard Pohlers

An ion exchange resin comprises a crosslinked resin and a salt covalently bonded to a carbon of the resin, wherein the salt comprises a first non-metallic cation and a first counteranion, wherein the first counteranion comprises a second non-metallic cation and a thiosulfate counteranion, and wherein the ion exchange resin is essentially free of metals. The ion exchange resin finds particular use in the removal of impurities from solutions that are useful in the manufacture of semiconductor devices.

Ion exchange resins, purification methods and methods of making ionic resins

Provided are purification methods, comprising: (a) providing an organic solvent and a phenolic peroxide formation inhibitor, wherein the organic solvent has a first boiling point at standard atmospheric pressure (bp) and the phenolic peroxide formation inhibitor has a second boiling point at standard atmospheric pressure (bp) that satisfy the following inequality (I):bp&#x2264;(1.10)(bp)&#x2003;&#x2003;(I); and(b) heating the organic solvent and the phenolic peroxide formation inhibitor to a temperature causing the organic solvent and phenolic peroxide formation inhibitor to vaporize, and (ii) condensing the vaporized organic solvent and peroxide formation inhibitor to provide a purified mixture of the organic solvent and peroxide formation inhibitor. The methods find particular use in the purification of solvents that are useful in process chemicals for the manufacture of semiconductor devices.

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Clinton, MA, United States of America

Andrey Rudenko