Spawnt Private S.a.r.l.

Andrey Lubentsov

Christian Bauch

Rumen Deltschew

Sven Holl

Javad Mohsseni

Seyed-Javad Mohsseni-Ala

A process for preparing a halogenated polysilane HSiXwith n=1 to 50; 0&#x2266;p&#x2266;2n+1, and X=F, Cl, Br, I, as an individual compound or a mixture of compounds, from a mixture which includes the halogenated polysilane or in which the halogenated polysilane is formed, additionally includes boron-containing impurities, wherein a) the mixture is admixed with at least 1 ppbw (parts per billion per weight) of a siloxane-forming oxidizing agent or siloxane, the boron-containing impurities forming compounds having a volatility and/or solubility different from the halogenated polysilanes, b) the halogenated polysilane is separated from the compound(s), and c) not more than 1 ppmw of water and not less than 1 ppb of siloxanes are present.

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Leipzig, Germany

Andrey Lubentsov