Benetech, Inc.

Cabot Microelectronics Corporation

Cmc Materials, Inc.

Andrew Wolff

Phillip W Carter

Steven Kraft

Benjamin Petro

Michael T Such

Kristin Hayes

Mary Cavanaugh

Elise Sikma

Jeffrey Cross

Mark E Freetly

Joseph P Pircon

The invention provides methods of inhibiting corrosion of a substrate containing metal. The substrate can be in any suitable form. In some embodiments, the metal is cobalt. The methods can be used with semiconductor wafers in some embodiments. The invention also provides chemical-mechanical polishing compositions and methods of polishing a substrate. A corrosion inhibitor can be used in the methods and compositions disclosed herein. The inhibitor comprises an amphoteric surfactant, a sulfonate, a phosphonate, a carboxylate, an amino acid derivative, a phosphate ester, an isethionate, a sulfate, a sulfosuccinate, a sulfocinnimate, or any combination thereof.

Corrosion inhibitors and related compositions and methods

A method of treating a material having a plurality of fines of a dusting material to prevent emanation of dust from the dusting material is described. An aqueous solution comprising a mixture of soluble non-ionic cellulose ether, a plasticizer, and a surfactant is provided. The aqueous solution is applied to a dusting material having a plurality of fines. The dusting material is transferred during the applying step from a first location to a second location as the aqueous solution is applied to the material having a plurality of fines. The dusting material is mixed with the aqueous solution to coat the material having a plurality of fines with the aqueous solution. The treated dusting material is accumulated into a mass of the material subsequent to the applying step wherein the aqueous solution is substantially evenly distributed throughout an interior portion of the mass of the treated dusting material.

Dust suppression formulas using plasticized cellulose ethers

The invention provides a chemical-mechanical polishing composition comprising (a) abrasive particles, (b) a cobalt accelerator selected from a compound having the formula: NRRRwherein R, R, and Rare independently selected from hydrogen, carboxyalkyl, substituted carboxyalkyl, hydroxyalkyl, substituted hydroxyalkyl and aminocarbonylalkyl, wherein none or one of R, R, and Rare hydrogen; dicarboxyheterocycles; heterocyclylalkyl-&#x3b1;-amino acids; N-(amidoalkyl)amino acids; unsubstituted heterocycles; alkyl-substituted heterocycles; substituted-alkyl-substituted heterocycles; N-aminoalkyl-&#x3b1;-amino acids; and combinations thereof, (c) a cobalt corrosion inhibitor, (d) an oxidizing agent that oxidizes a metal, and (e) water, wherein the polishing composition has a pH of about 3 to about 8.5. The invention further provides a method of chemically-mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrate contains cobalt.

Cobalt polishing accelerators

The invention provides a chemical-mechanical polishing composition comprising (a) abrasive particles, (b) a cobalt corrosion inhibitor, (c) a cobalt dishing control agent, wherein the cobalt dishing control agent comprises an anionic head group and a C-Caliphatic tail group, (d) an oxidizing agent that oxidizes cobalt, and (e) water, wherein the polishing composition has a pH of about 3 to about 8.5. The invention further provides a method of chemically-mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrate contains cobalt.

Cobalt dishing control agents

A method of treating a plurality of fines of a dusting material to prevent emanation of dust from the dusting material is described. An aqueous solution comprising a mixture of soluble non-ionic cellulose ether, a plasticizer, and a surfactant is provided. The aqueous solution is applied to a dusting material comprising a plurality of fines. The dusting material is transferred during the applying step from a first location to a second location as the aqueous solution is applied to the plurality of fines. The dusting material is mixed with the aqueous solution to coat the plurality of fines with the aqueous solution. The treated dusting material is accumulated into a mass of the material subsequent to the applying step wherein the aqueous solution is substantially evenly distributed throughout an interior portion of the mass of the treated dusting material.

A dust preventing crust on an exposed surface of a mass of a dusting material is formed from a dried liquid solution of a non-ionic cellulose ether, a surfactant, and water. The strength of the crust is increased by adding a plasticizer to the liquid solution prior to drying the liquid solution on the mass of dusting material. The strength of the dust preventing crust is increased over a strength of a dust preventing crust produced from drying a fluid solution comprising the non-ionic cellulose ether, the surfactant and water prior to adding the plasticizer.

Method of suppressing dust in piles and railcars using plasticized cellulose ethers

A method for treating a mass of coal to suppress emanation of coal dust therefrom, the mass of coal having, prior to treatment, an exposed surface from which dust may emanate, comprises applying to the exposed surface an aqueous fluid comprising gelatinized starch to form a layer of the fluid over the surface and drying the layer of the fluid to form a crust over the surface.

Method of preventing emanation of dust from a coal pile or railcar

A method for suppressing dust emanation from a dust-bearing material comprises applying to the material a dust suppressant that comprises molasses-derived protein.

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Darien, IL, United States of America

Andrew Wolff