Analog Devices,inc.

Sand 9, Inc.

Analog Devices International Unlimited Company

Andrew William Sparks

Jan H Kuypers

Tyler Adam Dunn

Florian Thalmayr

Michael Ziemkiewicz

Scott Robert Davis

Milind S Bhagavat

Guiti Zolfagharkhani

Alexei Gaidarzhy

Michael Howard Anderson

Todd M Borkowski

Jonathan Ephraim David Hurwitz

Shrenik Deliwala

Michael W Judy

Eoin Edward English

Kuang L Yang

Ronald Alan Kapusta

Javier Calpe Maravilla

Firas Sammoura

William David Sawyer

Scott Dennis Rommel

Erik D Barnes

Paul O'Sullivan

Maurizio Zecchini

Christophe Antoine

David Edward Fish

Krystian Balicki

Derek Gann

Erik Tarvin

Miles R Bennett

Monica Redon Segrera

A detector for use in detecting reflected or scattered light pulses for a lidar system includes a primary lens, a secondary lens, and a photodiode array. The primary lens is configured to collect and focus the light pulses, the secondary lens is configured to receive and further focus the light pulses from the primary lens, and the photodiode array is configured to receive and sense the light pulses from the secondary lens. At least one of the primary lens or the secondary lens are configured using liquid crystal polymer (LCP).

Liquid crystal polymer optics for lidar systems

A lidar system and method includes a photodiode array, a wafer, and a plurality of structures integrated on the wafer to form a metasurface lens. The metasurface lens is configured to focus the light pulses to the photodiode array and each of the plurality of structures includes at least one dimension that is less than a wavelength of the light pulses.

Metasurface array for lidar systems

The present disclosure provides numerous applications for the use of liquid crystal polarization gratings (LCPGs) to controllably steer light. When combined with an image sensor, light generated or reflected from different fields of view (FOV) can be steered, allowing an increase in the FOV or the resolution of the image. Further, the LCPG can stabilize the resulting image, counteracting any movement of the image sensor. The combination of LCPGs and liquid crystal waveguides (LCWGs) allows fine deflection control of light (from the LCWG) over a wild field of view (from the LCPG). Further applications of LCPGs include object tracking and the production of depth images using multiple imaging units and independently steered LCPGs. The LCPG may be used in controlling both the projection and reception of light.

Beam steering device using liquid crystal polarization gratings

A light detection and ranging (LIDAR) system comprises a laser diode; a laser diode driver circuit configured generate a laser beam using the laser diode and to frequency chirp the generated laser beam according to a frequency chirp period; a laser splitter to split the generated laser beam into N transmit laser beams pointed at different angles, wherein N is an integer greater than one, and a frequency chirp period of each of the N transmit laser beams is the frequency chirp period of the generated laser beam; and multiple return beam paths to receive N return beams and determine time of flight values for the N return beams in parallel.

Highly multiplexed coherent LIDAR system

A Liquid Crystal Waveguide (LCW) system can provide sub-aperture incoupling or outcoupling of light having an input wavelength and input beamsize defining an aperture characteristic of the system. A Liquid Crystal Waveguide (LCW) can include a generally planar LCW core to receive light via a light input zone for communication toward a light output zone. Sub-aperture interfacial light couplers can be planarly arranged in or parallel to the planar LCW core in the light input zone or the light output zone. Sub-aperture interfacial light couplers can include teeth, prisms, or facets, a photonic crystal metasurface, or a geometric-phased holograph (GPH)). Overall LCW thickness can be reduced, which can be helpful in space-limited applications or for reducing material costs.

Liquid crystal waveguide with sub-aperture light coupling

In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis.

Microelectromechanical gyroscopes and related apparatus and methods

An optical coupler can be provided for coupling a light beam into a waveguide. The optical coupler can include a stepped structure, such as to reduce difficulties during manufacture, reduce expenses associated with manufacture, and additionally, to provide an increased acceptance angle of the optical coupler. The waveguide can include a guiding region where a cladding thickness can be increased relative to a coupling region, such as to reduce losses due to evanescent outcoupling in the guiding region.

Step couplers for planar waveguides

Methods and apparatus for anchoring resonators, such as microelectromechanical systems (MEMS) resonators. A resonator may include a substrate, a mechanical resonating structure, and at least one anchor. The mechanical resonating structure may be configured to resonate in a resonance mode of vibration at a frequency. The anchor may couple the mechanical resonating structure to the substrate. The anchor may be configured to exhibit an acoustic bandgap at the frequency of the resonance mode of vibration of the mechanical resonating structure. The anchor may be oriented in a direction substantially parallel to a direction of propagation of the resonance mode of vibration of the mechanical resonating structure.

Methods and apparatus for anchoring resonators

Apparatus and methods for control of the second order temperature dependence of the frequency of a mechanical resonating structure are described. The second order temperature dependence of frequency of the mechanical resonating structure may be non-linear. Control may be provided by doping of a semiconductor layer of the mechanical resonating structure.

Compensation of second order temperature dependence of mechanical resonator frequency

Microelectromechanical systems (MEMS) resonators and related methods and apparatus are provided. A MEMS resonator may include a first portion and a second portion. The first portion may be configured to resonate, and the second portion may be configured to operate based on an energy trapping principle to prevent energy from traveling therethrough from the first portion. The MEMS resonator may be a Lamb wave resonator. The MEMS resonator may be anchorless. The MEMS resonator may have a side contacted by the anchor, wherein the anchor contacts greater than approximately 50% of the side.

Microelectromechanical system resonators and related methods and apparatus

Mechanical resonating structures, as well as related devices and methods of manufacture. The mechanical resonating structures can be microphones, each including a diaphragm and a piezoelectric stack. The diaphragm can have one or more openings formed therethrough to enable the determination of an acoustic pressure being applied to the diaphragm through signals emitted by the piezoelectric stack.

MEMS microphone

Micromechanical resonators having stub anchors are described. The micromechanical resonators may be suspended, being connected to a substrate or support by one or more anchors. The anchor(s) may include one or more stubs which can impact the acoustic impedance of the anchor(s). The stub(s) may have various shapes and sizes. In some instances, multiple resonators may be coupled together by a connector having one or more stubs.

Resonator anchors and related apparatus and methods

A MEMS sensor includes at least one closed nodal anchor along a predetermined closed nodal path on at least one surface of a resonant mass. The resonant mass may be configured to resonate substantially in an in-plane contour mode. Drive and/or sense electrodes may be disposed within a cavity formed at least in part by the resonant mass, the closed nodal anchor, and a substrate.

MEMS sensors with closed nodal anchors for operation in an in-plane contour mode

Apparatus and methods for control of charge in a semiconductor material of a mechanical resonating structure are described. Controlling the charge of the material may control the material properties of the semiconductor, such as the stiffness. Such control may result in changes in the behavior of the mechanical resonating structure, allowing for control and tuning of the behavior of the mechanical resonating structure.

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Arlington, MA, United States of America

Andrew William Sparks