Texas Instruments Corporation

Andrew Steven Dewa

Arthur Monroe Turner

John Walter Orcutt

Mark W Heaton

Tsen-Hwang Lin

David I Forehand

Herzel Laor

James A Sisco

Terence Joseph Murphy

Robert C Keller

Philip A Congdon

Philip A Roden

Carter Bruce Simpson

Kim D Hyland

Carter B Simpson

A multilevel mirror plate suitable for use with a torsional hinged mirror assembly is laser milled to provide a more effective truss structure in less time and at a reduced cost.

Manufacturing a mirror plate or other operational structure having superior flatness by laser milling for use with torsional hinged devices

A method for increasing the resonant frequency of a torsional hinged device having a reduced attaching area between the torsional hinges and the supporting anchors. The resonant frequency is increased by adding a material over the reduced area to stiffen the connection between the torsional hinges and the support anchors.

Method for adjusting the resonant frequency of an oscillating device

A torsional hinged resonant device having an improved anchor support for providing inertia drive. The area by the anchors connecting the torsional hinges to the support member are thinned to have a reduced cross section. The reduced or thinned area increases flexibility such that less force is required to generate a desired angular rotation.

Resonant oscillating device actuator structure

System and method for operating four resonant torsional hinged mirrors such as torsional hinged MEMS devices at the same oscillating frequency suitable for use in a color printer requiring four serially arranged line printers.

Serial printing with multiple torsional hinged MEMS mirrors

Apparatus and method for adjusting the resonant frequency of an oscillating device

An oscillating torsional hinged device, such as a mirror, having the advantages of an oscillating device with permanent magnets mounted on the hinges, but without excessive size is disclosed. The permanent magnets are mounted in the areas of the anchor members rather than directly on the hinges.

Magnet on frame oscillating device

A micromirror array assembly () for use in optical modules () in a wireless network system is disclosed. The micromirror array assembly () includes a plurality of mirrors () monolithically formed with a frame (), attached by way of hinges () and gimbal portions (). Permanent magnets () are attached to each of the gimbal portions () associated with the mirrors (). The resulting frame () is then mounted to a coil driver assembly () so that coil drivers () can control the rotation of each mirror (), under separate control from control circuitry (). The micromirror array assembly () is thus able to support higher signal energy at larger spot sizes, and also enables multiplexed transmission and receipt, as well as sampling of the received beam for quality sensing. A method of manufacturing the micromirror array assembly () is also disclosed, in which a support wafer () is temporarily bonded to the mirror wafer () while the permanent magnets () are attached.

Cooperating array of micromirror devices for wireless optical communication

System and method for generating lines of data on a photosensitive medium for use with a display or a printing apparatus. The lines of data are generated by two or more modulated and parallel laser light beams onto a resonant pivoting torsional hinged mirror. The pivoting mirror sweeps the two modulated light beams back and forth across the photosensitive medium to provide bi-directional printing. Relative motion between the photosensitive medium and the plane of the sweeping light beam is provided by moving the photosensitive medium when used with a printing apparatus or by also orthogonally moving the sweeping plane of the light beams when used with a display device.

Multilaser bi-directional printer with an oscillating scanning mirror

A magnetic drive for providing pivotal motion to a functional surface, such as a mirror. The magnetic drive may be used to drive any torsional hinged device, but is particularly suitable for driving a torsional hinged mirror. According to a first embodiment, a dual axis functional surface uses a first pair of torsional hinges to provide primary movement to the functional surface and a second pair of torsional hinges provides movement orthogonal to the primary movement to allow positioning in two directions. The mass and movement of inertia of the functional surface is reduced by relocating permanent magnet sets to the axis of rotation. The reduced mass and movement of inertia results in a stiff robust hinge having a resonant frequency above about 120 Hz.

Pivoting mirror with improved magnetic drive

A system and method for providing a resonant beam sweep about a first axis. A mirror or reflective surface supported by a first pair of torsional hinges is driven into resonant oscillations about the first axis by inertially coupling energy through the first pair of torsional hinges. A light source reflects a beam of light from the mirror such that the oscillating mirror produces a beam sweep across a target area. The resonant beam sweep is moved orthogonally on the target area by a gimbals portion of the mirror pivoting about a second axis according to one embodiment. A second independent mirror provides the orthogonal movement according to a second embodiment.

Resonant scanning mirror with inertially coupled activation

A multilayered torsional hinged scanning mirror including a hinge layer with a mirror attaching member pivotally supported by torsional hinges. A mirror layer is bonded to the front side of the attaching member and a back layer is bonded to the back side of the attaching member. The mirror layer and the back layer are equal in mass and weight to balance the moment of inertia and stresses on the torsional hinges. The back layer may be a permanent magnet if the mirror oscillating drive is a magnetic drive. Alternately, the back layer may be another silicon slice.

Multilayered oscillating functional surface

A position sensor for a pivoting platform which has a first portion that flexes when the platform pivots and a second portion of the platform that is rigid, utilizes a piezoresistive element on the first portion of the platform. A connecting terminal for the piezoresistive element is on the second portion and thus not subject to the flexing stresses. The platform can have two symmetrical arms as the flexing portion, and a pair of piezoresistive elements can be formed on each of the arms in order to double the output voltage changes with changes in these positions of the platform. A temperature compensating piezoresistive element can be formed on the rigid portion of the platform and connected to the piezoresistive element or elements. The piezoresistive elements can be formed directly on the portions of the platform.

Position sensor for a pivoting platform

System and method for establishing and maintaining resonant oscillations of a torsional hinged device such as a pivotally hinged mirror. The system and methods comprise a permanent magnet mounted to the pivoting mirror that interacts with an electromagnetic coil. The magnetic coil is periodically connected and disconnected from a DC power supply in response to a series of drive pulses having a timing and duration such that the magnetic forces generated by the interaction of the permanent magnet and the electromagnetic coil maintains resonant oscillations of the device.

Pulse drive of resonant MEMS devices

A system and method for providing resonant movement about a first axis. A functional surface supported by a first pair of torsional hinges is driven into resonant oscillations about the first axis by inertially coupling energy through the first pair of torsional hinges. The resonant movement may be moved orthogonally on the target area by a gimbals portion of the functional surface pivoting about a second axis according to one embodiment. The resonant oscillation of the functional surface is monitored to detect changes in frequency due to mass changes of the functional surface.

Resonant pivoting surface with inertially coupled activation

A laser printer using a single frequency resonant mirror for providing the beam sweep for printing at a multiplicity of printing speeds. According to a first embodiment, a pair of torsional hingesandprovides the resonant beam sweep. The number of line images per unit of measurement is changed as a function of printer speeds to achieve the desired image proportions.

Growing community of inventors

Plano, TX, United States of America

Andrew Steven Dewa