Applied Materials, Inc.

Andrew Scott Cornelius

Michael Robert Rice

Jeffrey C Hudgens

Eric Andrew Englhardt

Nir Merry

Steven Victor Sansoni

Dean C Hruzek

Amitabh Puri

Robert Irwin Decottignies

Steve Szudarski

Peter Irwin

In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.

Linked vacuum processing tools and methods of using the same

Growing community of inventors

San Jose, CA, United States of America

Andrew Scott Cornelius