Applied Materials, Inc.

Andrew Paul Harbert

Leon Volfovski

Michael C Kuchar

Douglas R McAllister

Nicholas Michael Bergantz

Karuppasamy Muthukamatchi

Sivakumar Ramalingam

A method includes receiving, by a first loadlock chamber of the loadlock system, a first object from a factory interface via a first opening. The first object is transferred into the first loadlock chamber via a first robot arm. The factory interface is at a first state. The first loadlock chamber is configured to receive different types of objects. The method further includes sealing a first loadlock door against the first opening to create a first sealed environment at the first state in the first loadlock chamber and causing the first sealed environment of the first loadlock chamber to be changed to a second state. The method further includes actuating a second loadlock door to provide a second opening between the first loadlock chamber and a transfer chamber. The first object is to be transferred from the first loadlock chamber to the transfer chamber via a second robot arm.

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Austin, TX, United States of America

Andrew Paul Harbert