Applied Materials, Inc.

Other

Varian, Inc.

Andrew Myles

Phillip A Criminale

Zhiqiang Guo

Denis M Koosau

Peter Muraoka

Martin Perez-Guzman

Philip Allan Kraus

Steven E Babayan

Andreas Schmid

Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.

Calibration jig and calibration method

A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.

Diagnostic disc with a high vacuum and temperature tolerant power source

Examples disclosed herein are directed to a method and apparatus for determining a position of a ring within a process kit. In one example, a sensor assembly for a substrate processing chamber is provided. The sensor assembly includes a housing having a top surface, a bottom surface opposite the top surface, and a plurality of sidewalls connecting the top surface to the bottom surface. The housing also has a recess in the top surface, the recess forming an interior volume within the housing. The sensory assembly includes a bias member, and a contact member disposed on the bias member. The bias member and contact member are disposed within the recess. A sensor is configured to detect a displacement of the contact member. The displacement of the contact member corresponds to a relative position of an edge ring.

Method and apparatus for determining a position of a ring within a process kit

A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.

Implementations described herein provide a method for calibrating a temperature of a substrate support assembly which enables discrete tuning of the temperature profile of a substrate support assembly. In one embodiment, a system, comprises a memory, wherein the memory includes an application program configured to perform an operation on a substrate support assembly, a control board disposed in a substrate support assembly, wherein the control board comprises a processor having an wireless interface, a pulse width modification (PWM) heater controller, wherein the processor is connected with the memory to read and access the application program from the memory when in operation, and a heating element coupled to the pulse width modification (PWM) heater controller, wherein the heating element comprises a plurality of spatially tunable heaters that are individually tunable by the pulse width modification (PWM) heater controller.

Temperature tunable multi-zone electrostatic chuck

A bypass valve allows fast and reliable sequential transfer of samples from a 96-well plate to a flow-through nuclear magnetic resonance (NMR) probe of an NMR spectrometer. The bypass valve has three ports: an inject port connected to a first input of the flow-through probe; a load port connected to a needle capable of drawing the samples from the 96-well plate; and a hold port connected to a holding loop. The syringe pump draws a sample from the 96-well plate through the needle and the bypass valve into the holding loop. The position of the bypass valve is switched, and the sample and a dose of push solvent are pushed into the flow-through probe through the bypass valve. After NMR measurements are performed on the sample, the sample is drawn into the holding loop through the bypass valve, at the same time as air is flushed through the probe. The position of the bypass valve is again switched, and the sample is pushed out through the needle.

Growing community of inventors

Sunnyvale, CA, United States of America

Andrew Myles