Phase Focus Limited

University of Durham

Andrew Maiden

Martin James Humphry

Kevin Langley

James Russell

Paul Christopher Roberts

Alan Purvis

John Marius Rodenburg

Richard Peter McWilliam

Gavin Lewis Williams

Nicholas Luke Seed

Peter Anthony Ivey

Simon Johnson

Embodiments of the present invention provide a method of providing image data for constructing an image of at least a region of a target object, comprising the steps of simultaneously recording, at a detector, a plurality of separable diffraction patterns formed by a respective portion of radiation scattered by the target object; and providing the image data via an iterative process responsive to the detected intensity of radiation.

Providing image data

Embodiments of the invention provide a method of determining one or more characteristics of a target object, comprising recording one or more diffraction patterns at a detector, wherein each diffraction pattern is formed by a target object scattering incident radiation, determining a phase map for at least a region of the target object based on the one or more diffraction patterns, and determining a refractive property of the target object based on the phase map.

Method and apparatus for determining object characteristics

Embodiments of the present invention provide a method () of providing image data for constructing an image of a region of a target object, comprising detecting, by at least one detector (), at least a portion of radiation scattered by a target object () with the incident radiation () or an aperture at a predetermined probe position, determining an offset vector () for reducing an error associated with the probe position (), estimating a wavefront () based on a probe function having the offset vector applied to the probe position, and providing image data responsive to the detected radiation.

Method and apparatus for providing image data for constructing an image of a region of a target object

A method of providing image data for constructing an image of a region of a three dimensional target object, comprising providing, from a radiation source, incident radiation directed at a target object, detecting an intensity of radiation scattered by the target object, and determining image data for each of a respective plurality of slices within the target object each indicating one or more characteristics of the target object at a respective depth within the target object, wherein the image data is determined based on the detected intensity of radiation via an iterative process wherein running estimates of the image data for each of the plurality of slices are updated step by step.

Method and apparatus for imaging a three dimensional target object using incident radiation

Embodiments of the present invention provide a method of estimating a magnitude of background radiation for each of a plurality of regions of a target object comprising providing an estimate of background radiation detected by a detector, measuring radiation scattered by the target object at the detector for each of a plurality of positions of the object with respect to the incident radiation, calculating, for each of the positions, an estimate of a wavefront at the detector, and determining, for each position, an estimated wavefront comprising a coherent contribution from radiation scattered by the target object and a background contribution, wherein said background contribution is at least partly incoherent with the radiation scattered by the target object. This method is particularly suitable for performing coherent diffractive imaging using ptychography where contribution from the incoherently scattered background is taken into account.

Phase retrieval from ptychography

Embodiments of the invention provide a method of determining one or more characteristics of a target object, comprising determining a first phase map for at least a region of a target object based on radiation directed toward the target object, determining one or more further phase maps for a sub-region of the region of the target object, determining a number of phase wraps for the sub-region based on a plurality of phase maps for the sub-region, and determining a characteristic of the region of the target object based on the number of phase wraps for sub-region and the first phase map. Embodiments of the invention also relate to a method of determining one or more characteristics of a target object, comprising determining a phase map for at least a region of a target object based on one or more diffraction patterns, determining a wavefront at a plane of the object based upon the phase map, and determining a refractive property of the object based on the wavefront.

Embodiments of the present invention provide a computer-based method for providing image data of a region of a target object (), comprising the steps of estimating () a first intermediate object function indicating at least one characteristic of a first sub-region () of said region of the target object, estimating () a second intermediate object function indicating at least one characteristic of a second sub-region () of said region of the target object, and combining () the first and second intermediate object functions to form a combined object function indicating at least one characteristic of the region of the target object ().

Field of imaging

Embodiments of the present invention provide a method of providing image data for constructing an image of a region of a target object, comprising providing incident radiation from a radiation source at a target object, detecting, by at least one detector, a portion of radiation scattered by the target object with the incident radiation or an aperture at first and second positions, and providing image data via an iterative process responsive to the detected radiation, wherein in said iterative process image data is provided corresponding to a portion of radiation scattered by the target object and not detected by the detector.

Embodiments of the present invention provide a method of determining at least one characteristic of a target surface, comprising providing a phase map for a first region of a target surface via radiation having a first wavelength, providing n further phase maps for the first region via radiation having a further n wavelengths each different from the first wavelength, and determining at least one characteristic at the target surface responsive to the first and further phase maps.

Characteristic determination

A method and apparatus are disclosed for generating a plurality of scattered radiation patterns at an image plane of an optical microscope. The apparatus includes at least one lens element, a liquid crystal display (LCD) array, and a housing comprising a body portion supporting the LCD array and lens element in a predetermined spaced apart relationship. The LCD array comprises a plurality of pixel elements arranged in a grid layout, said array being connectable to a processing element adapted to selectively control a transmittance of each pixel in the grid layout.

Quantative phase imaging microscope and method and apparatus performing the same

Embodiments of the present invention provide a method of providing image data for constructing an image of a region of a target object () comprising providing incident radiation from a radiation source at a target object (); detecting, by at least one detector (), a portion of radiation scattered by the target object; and providing image data via an iterative process responsive to the detected radiation (), wherein said iterative process comprises estimating a wave front of scattered radiation at a plane of the detector, updating a portion of the wave front based on the detected radiation, leaving a portion of the estimated wave front substantially unchanged, setting a portion of the wave front, corresponding to a portion of radiation scattered by the target object and not detected by the detector, to one or more values, and providing image data based upon the updated wave front.

Method and apparatus for providing image data

A method of providing image data for constructing an image of a region of a target object, comprising providing a reference diffraction pattern of a reference target object; determining an initial guess for a probe function based upon the reference diffraction pattern; and determining, by an iterative process based on the initial guess for the probe function and an initial guess for an object function, image data for a target object responsive to an intensity of radiation detected by at least one detector.

Calibration of a probe in ptychography

A method and apparatus are disclosed for providing image data for generating an image of a region of a target object. The method includes the steps of providing incident radiation, focusing the radiation downstream or upstream of a target object and via at least one detector located downstream of a focusing element, detecting an intensity of radiation scattered by the target object at an observation plane offset from a back focal plane associated with the focusing element.

A method and apparatus are disclosed for providing image data. The method includes the steps of providing incident radiation from a radiation source at a target object and, via at least one detector, detecting an intensity of radiation scattered by the target object. Also via the at least one detector an intensity of radiation provided by the radiation source absent the target object is detected. Image data is provided via an iterative process responsive to the intensity of radiation detected absent the target object and the detected intensity of radiation scattered by the target object.

Provision of image data

A method of generating a holographic diffraction pattern and a holographic lithography system. The method involves defining at least one geometrical shape; generating at least one line segment to represent the at least one geometrical shape; calculating a line diffraction pattern on a hologram plane, including calculating the Fresnel diffraction equation for an impulse representing the at least one line segment with a line width control term and a line length control term; and adding vectorially, where there are two or more line segments, the line diffraction patterns to form the holographic diffraction pattern. The method and system enables holographic masks to be generated without creating a physical object to record. The required shapes or patterns are defined in terms of a three-dimensional coordinate space and a holographic pattern is generated at a defined distance from the shapes in the coordinate space.

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Sheffield, United Kingdom

Andrew Maiden