McMaster University

Ranovus Inc.

Columbia University

Andrew Knights

Dylan Logan

Bin Cao

Rong Chen

Douglas J S Beckett

Keren Bergman

Kishore Padmaraju

Ryan Murray Hickey

Christopher James Brooks

Henry Frankis

Dawson Bonneville

Khadijeh Miarabbas Kiani

Zhao Wang

Jonathan Bradley

David Hagan

Benjamin Torres-Kulik

Douglas Beckett

Methods for post-fabrication trimming of a silicon ring resonator are disclosed. Methods include fabricating a heating element, positioned within 2 microns of the silicon ring resonator, subjecting the silicon ring resonator to energetic ion implantation, and annealing the silicon ring resonator, using the heating element. The energetic ion implantation shifts a resonance of the silicon ring resonator towards the red side of the electro-magnetic spectrum. The annealing shifts the resonance of the silicon ring resonator towards the blue side of the electro-magnetic spectrum.

Post-fabrication trimming of silicon ring resonators via integrated annealing

In various example embodiments, hybrid waveguide devices are disclosed based on a silicon nitride waveguide conformally coated with a tellurium oxide layer. A tellurium oxide layer is deposited over a silicon nitride waveguide such that the tellurium oxide layer forms a conformal layer that inherits the underlying shape of the silicon nitride waveguide, thereby forming a conformal raised region above the silicon nitride waveguide, while also forming planar regions that extend laterally from the silicon nitride waveguide. The present example hybrid waveguide structures enable the formation of a guided single mode that extends from the raised region of the tellurium oxide layer that resides above the silicon nitride waveguide into the silicon nitride waveguide, and the dimensions of the structure may be selected such that a majority of the optical mode is confined within the tellurium oxide layer, at least over a portion of the infrared region.

Hybrid optical waveguides of tellurium-oxide-coated silicon nitride and methods of fabrication thereof

A device and method for tuning a ring resonator using self-heating stabilization is provided. A light source is controlled to produce an optical signal, input to an optical ring resonator, at a power where self-heating shifts a resonance wavelength of the optical ring resonator by at least 10 picometers, the self-heating comprising absorption in the optical ring resonator of optical power from a received optical signal. Prior to using the optical ring resonator at least one of modulate and filter the optical signal at the optical ring resonator, a heater of the optical ring resonator is controlled to an operating temperature at which the resonance wavelength of the optical ring resonator is greater than a respective wavelength of the optical signal.

Device and method for tuning a ring resonator using self-heating stabilization

Systems and methods are provided for stabilizing the resonance properties of a microring resonator modulator. Intrinsic optical absorption within the p-n junction of a microring modulator resonator is employed as a feedback signal for thermally stabilizing the microring resonator modulator. In some example embodiments, the input optical power provided to a bus waveguide that is optically coupled to the microring resonator modulator is sufficiently low such that the photocurrent dependence on input power is predominantly linear in nature, thereby avoiding or reducing the effect of nonlinear absorption through two-photon absorption. The example embodiments described herein may be employed to achieve a fabrication process that is free of heterogeneous device integration, for example, avoiding the integration of germanium detectors with a silicon-based integrated optical circuit or the need to sacrifice a portion of the ring resonator circumference for the integration of an extrinsic defect-mediated photodetector, thus reducing complexity and manufacturing cost.

Systems and methods for resonance stabilization of microring resonator

A device that includes an optical coupler with a waveguide and waveguide index matched materials at an edge of a substrate, and a method of forming the device, is provided herein. The device comprises: a substrate having an edge, and an opening formed therein adjacent the edge; a layer of insulator on the substrate, which forms a bridge across the opening at the edge; a waveguide on the layer of insulator, the waveguide comprising a constant-width region and a tapered region terminating at the edge in a region of the opening; a first layer of optical epoxy in the opening, the optical epoxy indexed matched to the layer of insulator; and, a second layer of the optical epoxy on the tapered region, such that the optical epoxy optically contains an optical signal leaking from the waveguide in the tapered region.

Optical coupler with a waveguide and waveguide index matched materials at an edge of a substrate

A device and method for post-fabrication trimming of an optical ring resonator using a dopant-based heater is provided. An optical ring resonator at the device can be heated using heaters in an optical slab from which the optical ring resonator extends, the heater including a non-uniform doping profile. A controller determines an initial resonance frequency and a target resonance frequency of the optical ring resonator. The controller applies predetermined electrical parameters to the heater using electrical connections to shift a resonance frequency of the optical ring resonator from the initial resonance frequency to the target resonance frequency by causing the dopant in the heater to migrate.

Device and method for post-fabrication trimming of an optical ring resonator using a dopant-based heater

Embodiments of the present disclosure provide devices and methods involving the thermal stabilization of microring resonators, such as microring modulators. Power is measured via an on-chip photodetector integrated with a drop port of the microring resonator, providing a local measurement of average power. This average power is employed as a feedback measure to actively control a heater that is integrated with the microring resonator, in order to stabilize the resonant wavelength of the microring resonator in the presence of thermal fluctuations. Employing such a system, a microring modulator can maintain error-free performance under thermal fluctuations that would normally render it inoperable.

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Dundas, Canada

Andrew Knights