Robert Boschgmbh

Akustica, Inc.

Andrew Jonathan Doller

Daniel Meisel

Yujie Zhang

Gokhan Hatipoglu

Michael James Daley

Thomas Buck

Franz Laermer

Daniel Christoph Meisel

Bernhard Gehl

Sucheendran Sridharan

Philip Sean Stetson

John Matthew Muza

Arnim Hoechst

Christoph Hermes

Michael Knauss

John William Zinn

Brett Mathew Diamond

David Pravlik

Dave Pravlik

Phillip Sean Stetson

Todd Martin Keebler

Zhijun Guo

Michael Peter Knauss

John M Muza

A MEMS microphone includes a substrate, a lower membrane supported on the substrate, an upper membrane suspended above the lower membrane, a first electrode supported on the lower membrane, and a second electrode supported on the upper membrane. The lower membrane and the upper membrane enclose a cavity in which the first electrode and the second electrode are located. The lower membrane and the upper membrane are each formed of silicon carbonitride (SiCN). The first electrode and the second electrode are each formed of polysilicon.

MEMS microphone system

A MEMS transducer system includes a MEMS transducer device for sensing at least one of pressure signal or acoustic signal. The MEMS transducer device includes first and second diaphragms. Formed between the diaphragms are a spacer, plate capacitor elements, and electrode elements. The plate capacitor elements are coupled to the diaphragms via the spacer. An optional member may be disposed within the spacer. The distal ends of the electrode elements are coupled to a structure such as insulator element. An optional oxides may be formed within the plate capacitor elements. Pressure sensing electrode formed between the diaphragms may be coupled to the insulator element.

MEMS transducer system for pressure and acoustic sensing

A MEMS microphone system comprises a transducer die having a pierce-less diaphragm and a motion sensor suspended from the diaphragm. The system further comprises a housing and the diaphragm divided a volume inside the housing into a front volume and a back volume. The motion sensor suspended from the diaphragm is located in the back volume having a gas pressure that is substantially equal or lower than an ambient pressure.

MEMS microphone system with low pressure gap and back volume

A system includes a pressure sensor combined with a MEMS microphone. The pressure sensor and the MEMS microphone arranged side by side are formed on a same substrate.

System of non-acoustic sensor combined with MEMS microphone

A microphone system includes first diaphragm element, second diaphragm element spaced apart from the first diaphragm element and connected to the first diaphragm element via a spacer. Disposed between the diaphragm elements is a plate capacitor element.

MEMS microphone system having an electrode assembly

A Microelectromechanical system (MEMS) microphone comprises a base unit and a driving system disposed on the base unit. The driving system comprises a first diaphragm, a second diaphragm spaced apart from the first diaphragm, and a comb finger counter electrode assembly comprising a moving electrode member, the counter electrode assembly is mechanically coupled to the first and second diaphragms. The driving system further comprises a side wall mechanically coupled the first diaphragm to the second diaphragm defining a sealed electrode region and the sealed electrode region having an encapsulated gas pressure and the comb finger counter electrode assembly is disposed within the sealed electrode region.

MEMS microphone system and method

Microphone systems including a MEMS microphone and an electronic controller. The MEMS microphone includes a movable membrane and a backplate. The movable membrane includes a capacitive electrode and a piezoelectric electrode. The capacitive electrode is configured such that acoustic pressures acting on the movable membrane cause movement of the capacitive electrode. The piezoelectric electrode alters a mechanical property of the MEMS microphone based on a control signal. The backplate is positioned on a first side of the movable membrane. The electronic controller is electrically coupled to the piezoelectric electrode and is configured to generate the control signal.

Controlling mechanical properties of a MEMS microphone with capacitive and piezoelectric electrodes

A MEMS microphone having a backplate, a spring, and a membrane. In one embodiment, the membrane is supported in an approximate center of the membrane via a support. The support is connected to the approximate center of the membrane and an approximate center of the backplate. The membrane is connected to a spring that provides an electrical connection. The membrane may be electrically biased via the electrical connection. One or more overtravel stops are fixed to the backplate and pass through an aperture of the membrane. The overtravel stops are configured to prevent movement of the membrane in a radial direction opposite to the backplate. The membrane includes a stress gradient, a corrugation, or another structure that sets or determines a stiffness of the membrane.

Center-fixed MEMS microphone membrane

Systems and method for providing an audio output with an acoustic intensity analyzer. The acoustic intensity analyzer includes an acoustic intensity array, a controller, and an orientation sensor. The acoustic intensity array is fixed to the acoustic intensity analyzer. The controller is coupled to the acoustic intensity array to produce the audio output using acoustic holography based on an input from the acoustic intensity array. The controller is configured to set an aim of the acoustic holography in a selected direction. The orientation sensor is coupled to the controller and mechanically fixed to the acoustic intensity analyzer such that there is no relative movement between the orientation sensor and the acoustic intensity array. The orientation sensor detects a change in an orientation of the acoustic intensity array and provides an orientation signal to the controller for adjusting the aim of the acoustic holography to maintain the selected direction.

Adaptive acoustic intensity analyzer

Systems for controlling parameters of a MEMS microphone. In one embodiment, the microphone system includes a MEMS microphone and a controller. The MEMS microphone includes a movable electrode, a stationary electrode, and a driven electrode. The movable electrode is configured such that acoustic pressure acting on the movable electrode causes movement of the movable electrode. The stationary electrode and the driven electrode are positioned on a first side of the movable electrode. The driven electrode is configured to alter a parameter of the MEMS microphone based on a control signal. The controller is coupled to the stationary electrode and the driven electrode. The controller is configured to determine a voltage difference between the movable electrode and the stationary electrode. The controller is also configured to generate the control signal based on the voltage difference.

Microphone system with driven electrodes

Microphone systems and methods of determining absolute sensitivities of a MEMS microphone. The microphone system includes a speaker, a MEMS microphone, and a controller. The speaker is configured to generate an acoustic pressure. The MEMS microphone includes a capacitive electrode, a piezoelectric electrode, and a backplate. The capacitive electrode is configured to generate a first capacitive response based on the acoustic pressure and generate a first mechanical pressure based on a capacitive control signal. The piezoelectric electrode is coupled to the capacitive electrode. The piezoelectric electrode is configured to generate a first piezoelectric response signal based on the acoustic pressure and generate a second piezoelectric response signal based on the first mechanical pressure. The controller is configured to generate the capacitive control signal and determine an absolute sensitivity of the capacitive electrode based on the first capacitive response, the first piezoelectric response signal, and the second piezoelectric response signal.

Absolute sensitivity of a MEMS microphone with capacitive and piezoelectric electrodes

A microelectromechanical system (MEMS) microphone in one embodiment includes a backplate, a back cavity aligned with the backplate, at least one post extending from the backplate toward the back cavity, a membrane positioned between the backplate and the back cavity and including an inner portion and an outer portion, a gap defined by a planar portion of the inner portion and the backplate, a spring arm defined in the outer portion and supported by the at least one post, a first leak path between the back cavity and the gap defined between the inner portion and the spring arm, a second leak path between the back cavity and the gap defined between the spring arm and the back cavity, and a first leak path constriction configured to restrict leakage through at least one of the first leak path and the second leak path.

MEMS device with acoustic leak control features

Systems and methods for controlling parameters of a MEMS microphone. The microphone system includes a MEMS microphone and a controller. The MEMS microphone includes a movable electrode, a stationary electrode, and a driven electrode. The movable electrode has a first side and a second side that is opposite the first side. The movable electrode is configured such that acoustic pressures acting on the first side and the second of the movable electrode cause movement of the movable electrode. The stationary electrode is positioned on the first side of the movable electrode. The driven electrode is configured to receive a control signal and alter a parameter of the MEMS microphone based on the control signal. The controller is configured to determine a voltage difference between the movable electrode and the stationary electrode. The controller is also configured to generate the control signal based on the voltage difference.

A MEMS microphone including a plurality of overtravel stops (OTS) connected to a perimeter of a membrane of the MEMS microphone. The OTS are released from a backplate layer during manufacturing and are configured to contact the backplate to restrict movement of the OTS and thus restrict movement of the membrane of the MEMS microphone. Embodiments of the invention provide, in particular, an overtravel stop that limits movement of the membrane in a radial direction.

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Pittsburgh, PA, United States of America

Andrew Jonathan Doller