USA As Represented by Secretary of the Navy

Andrew Jen

Daniel Louis Jean

Troy Caruso

Scott Rauscher

Thinh Q Hoang

Ezra Chen

Kevin Cochran

Kristopher Nodianos

Dan Jean

Muhammad Khan

The friction driven linear motor includes a slide element with a portion with a pair of parallel straight sides. The slide element is contiguous with a zig-zag spring-like element, which is contiguous with an anchor block, which is contiguous with a MEMS substrate. The zig-zag spring-like element deforms as the slide element moves away from the anchor block. There are opposing pairs of v-beam thermal actuators. Each actuator includes a projecting cantilever beam with an end tip cycled to impinge, angularly, the slide element and extend, therein frictionally pushing the slide. A modulating current ohmically cycles the actuator from retraction to braking to pushing. At high frequencies the cantilever beam never fully retracts. The entire linear motor is composed of and is etched on a MEMS substrate.

Mems friction drive linear motor

A MEMS unpowered pressure sensor device including a substrate, a flexible membrane operatively connected to the substrate, and a cantilever beam operatively connected to the substrate and suspended over the flexible membrane. The flexible membrane is configured to deform towards the cantilever beam upon pressure applied such that the deformed flexible membrane makes contact with the cantilever beam. The device may include a plurality of bond pads arranged around the flexible membrane. Each of the plurality of bond pads may include its own cantilever beam forming an array of a plurality of cantilever beams. The plurality of cantilever beams includes beams of different lengths. The device may include at least one bond pad on the substrate and over the flexible membrane. The cantilever beam may extend from at least one bond pad. The flexible membrane may deform in a substantially dome shape.

MEMS unpowered pressure sensor

An apparatus used in a fuze device, which includes a MEMS micro-rotor. The micro-rotor of the apparatus may move an explosive material, for example, a fuze material, from an out-of-line position to an in-line position. The micro-rotor includes an integral cavity in which the material may be safely loaded and held in the out-of-line position. At an appropriate time, the fuze device of a fully assembled ordnance may be armed. When the apparatus is activated, the micro-rotor carefully moves the explosive material to the in-line position, where the ordnance is armed.

MEMS rotary fuze architecture for out-of-line applications

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Alexandria, VA, United States of America

Andrew Jen