National Technology & Engineering Solutions of Sandia, LLC

Other

Andrew Jay Leenheer

Matt Eichenfield

Paul Charles Galambos

Roy H Olsson

Anna Tauke-Pedretti

Thomas A Friedmann

Khalid Mikhiel Hattar

Nils Otterstrom

Aleem Siddiqui

DeAnna Marie Campbell

Tzu-Ming Lu

Michael Shaw

Sean J Hearne

Daniel Robert Ward

Evan Michael Anderson

Katherine L Jungjohann

Shashank Misra

Scott William Schmucker

William Mook

Paul Stanfield

Claire Chisholm

Jeffrey Andrew Ivie

Daniel Dominguez

An acousto-optic modulator that includes a waveguide on an acoustic actuator is disclosed. The waveguide carries an optical signal having a UV or visible wavelength. When the acoustic actuator is activated, the optical signal in the waveguide is bathed in intense acoustic waves. By using a waveguide having the appropriate dimensions to strongly confine both the optical signal and the acoustic waves, strong optomechanical coupling may be achieved between the optical and acoustic modes, resulting in an efficient modulator. By employing either intra-modal or inter-modal conversion, the modulator may be used to implement a variety of dual- or single-sideband functions, including an isolator, a phase modulator, a single-sideband frequency shifter, or a high-extinction shutter.

Ultraviolet and visible light integrated acousto-optic modulators

A method of Atomic Precision Advanced Manufacturing (APAM) is provided, in which a substrate is doped from a dopant precursor gas. The method involves covering a surface of the substrate with a hard mask, selectively removing material from the hard mask such that selected areas of the substrate surface are laid bare, exposing the laid-bare areas to the dopant precursor gas, and heating the substrate so as to incorporate dopant from the dopant precursor gas into the substrate surface.

Method of chemical doping that uses CMOS-compatible processes

A CMOS-compatible actuator platform for implementing phase, amplitude, and frequency modulation in silicon nitride photonic integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled aluminum nitride actuators is disclosed. The platform, which may be fabricated in a CMOS foundry, enables scalable active photonic integrated circuits for visible wavelengths, and the piezoelectric actuation functions without performance degradation down to cryogenic operating temperatures. A number of devices are possible, including ring modulator devices, phase shifter devices, Mach-Zehnder interferometer devices, directional coupler devices (including tunable directional coupler devices), and acousto-optic modulator and frequency shifter devices, each of which can employ the same AlN actuator platform. As all of these devices can be built on the same AlN actuator platform, numerous optical functions can be implemented on a single die.

Piezoelectric deformable photonic devices

An amplifying radiofrequency device includes a piezoelectric film and a semiconductor amplifier layer. The piezoelectric film is conformed as an acoustic waveguide. The piezoelectric film has a principal acoustic propagation direction parallel to the principal conduction direction of the amplifier layer. Interdigitated transducers are positioned on the piezoelectric film to respectively launch an acoustic wave in response to an input RF signal, and transduce the acoustic wave back to an output RF signal. There is a distance of less than the acoustic wavelength between the semiconductor amplifier layer and the piezoelectric film. The piezoelectric film has a thickness of less than the acoustic wavelength. According to a method for making such a device, a stack of III-V layers is epitaxially grown on a III-V substrate, wherein the stack comprises a first etch stop layer, a second etch stop layer, an amplifier layer, and a contact layer. The stack is bonded to a lithium niobate film. The III-V substrate is removed by etching down to the first etch stop layer. Deposition windows are opened by etching from the first etch stop layer down to the contact layer. Metal contact electrodes are deposited in the deposition windows.

Hybrid semiconductor-piezoacoustic radiofrequency device

A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.

Active mechanical-environmental-thermal MEMS device for nanoscale characterization

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Albuquerque, NM, United States of America

Andrew Jay Leenheer