Corning Incorporated

Battelle Energy Alliance, LLC

Cymer, Inc.

Andrew Jay Effenberger, Jr

Scott Robertson Bickham

Thomas D Steiger

Timothy R McJunkin

Jill R Scott

Mark Christian Sanson

Edward Siqi Luo

Mohammad Amin Khamehchi

A pulsed-discharge radiation source includes a gas chamber, a window, and a conduit system. The conduit system includes a refill path and a conduit. The pulsed-discharge radiation source generates radiation. The gas chamber confines a gas and contaminants produced during the generation of radiation. The window isolates the gas from an environment external to the gas chamber and allows the radiation to travel between the gas chamber and the environment. The refill path allows a replacement of the gas. The conduit circulates the gas to or from the gas chamber during the generating. The conduit system directs a flow of one of a refill gas, the gas, or the refill gas and the gas at least during a refill operation to prevent the contaminant from contacting the window, whereby the conduit system increases the usable lifetime of at least the window.

Conduit system, radiation source, lithographic apparatus, and methods thereof

A Raman spectroscopy system is provided. The spectroscopy system includes an optical switch including a first side having a pump inlet and a return outlet, and a second side having a plurality of pump outlets and a plurality of return inlets. The spectroscopy system includes at least one radiation source optically coupled to the pump inlet and a detector optically coupled to the return outlet. The spectroscopy system further includes a pump filter module optically coupled between the at least one radiation source and the pump outlets and a return filter module optically coupled between the detector and the return inlets. The spectroscopy system further includes a plurality of probes, each probe optically connected to at least one of the plurality of pump outlets by at least one excitation fiber and optically coupled to one of the return inlets by at least one emission fiber.

Spectral filtering for Raman spectroscopy

In laser-induced breakdown spectroscopy (LIBS), an apparatus includes a pulsed laser configured to generate a pulsed laser signal toward a sample, a constructive interference object and an optical element, each located in a path of light from the sample. The constructive interference object is configured to generate constructive interference patterns of the light. The optical element is configured to disperse the light. A LIBS system includes a first and a second optical element, and a data acquisition module. The data acquisition module is configured to determine an isotope measurement based, at least in part, on light received by an image sensor from the first and second optical elements. A method for performing LIBS includes generating a pulsed laser on a sample to generate light from a plasma, generating constructive interference patterns of the light, and dispersing the light into a plurality of wavelengths.

Apparatus, system, and method for laser-induced breakdown spectroscopy

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San Diego, CA, United States of America

Andrew Jay Effenberger, Jr