Asml Holding N.v.

Asml Us, Inc.

Andrew Guzman

Pradeep Kumar Govil

Jorge S Ivaldi

Michael L Nelson

Ronald P Sidor

Carlo La Fiandra

A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.

Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit

Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use

A system for adjusting a deformable mirror including a reaction plate, a plurality of pneumatic actuators coupled to the reaction plate, and a plurality of push-pull flexures coupled on a first end to the pneumatic actuators, and coupled on a second end to the non-reflective side the deformable mirror, the plurality of push-pull flexures being disposed at various locations on the back of the deformable mirror. The respective pairs of push-pull flexures and pneumatic actuators are operated to support and alter the shape of the deformable mirror to allow for correction of a plurality of optical aberrations.

Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems

Growing community of inventors

Danbury, CT, United States of America

Andrew Guzman