International Business Machines Corporation

Andrew Gaul

Julien Frougier

Ruilong Xie

Kangguo Cheng

Chanro Park

Andrew Mark Greene

Christopher Joseph Waskiewicz

Veeraraghavan S Basker

Min Gyu Sung

Techniques for co-integrating gate-all-around nanosheet devices having bottom dielectric isolation with an ideal vertical P-N-P diode on a common substrate are provided. In one aspect, a semiconductor structure includes: a diode in a first region of a bulk substrate, where the diode includes P-N-P vertical implanted layers present in the bulk substrate, and a single source/drain region epitaxial material disposed on the P-N-P vertical implanted layers; and a nanosheet device with a bottom dielectric isolation layer in a second region of the bulk substrate. The nanosheet device can include nanosheet channels and gates that surround a portion of each of the nanosheet channels in a gate-all-around configuration. A method of fabricating the present semiconductor structures is also provided.

Integration of nanosheets with bottom dielectric isolation and ideal diode

Embodiments herein describe FETs with channels connected on the sides to a metal liner. To avoid the difficulties of connecting the sides of the channels to metal liners for the drain and source regions, the embodiments herein form a male/female contact between the channels and the metal liners. In one embodiment, instead of exposing only the end or side surfaces of the channels, an end knob of the channel is exposed. This knob can include the side surface as well as a portion of the top, bottom, front, and back sides of the channel. As such, when the metal liner is deposited on the knob, this metal forms an electrical connection on all sides of the knob. This male/female connection provides a more reliable and lower resistance connection between the channel and the metal liner than using only the end or side surfaces of the channel.

Wrap-around-contact for 2D-channel gate-all-around field-effect-transistors

A semiconductor device includes a field effect transistor (FET) with at least one Gate-All-Around (GAA) channel. A first conductive ferromagnetic Source/Drain contact is electrically connected with a first portion of the GAA channel. A second conductive ferromagnetic Source/Drain contact is electrically connected with a second portion of the GAA channel. A remanent magnetization of the first conductive ferromagnetic contact is oriented in a direction opposite to a remanent magnetization of the second conductive ferromagnetic contact.

Spin-based gate-all-around transistors

A stacked device is provided. The stacked device includes a plurality of dielectric support bridges on a substrate, and a first two-dimensional (2D) channel layer on each of the plurality of dielectric support bridges. The stacked device further includes a gate dielectric sheet on the first two-dimensional (2D) channel layer, and a second two-dimensional (2D) channel layer on the first two-dimensional (2D) channel layer. The stacked device further includes a second gate dielectric layer on the gate dielectric sheets.

Stacked planar field effect transistors with 2D material channels

Semiconductor structures are disclosed which comprise semiconductor devices having thin multi-layer channel stacks. In one example, a semiconductor structure comprises a gate structure comprising a multi-layer channel stack. The multi-layer channel stack comprises a first dielectric layer, a second dielectric layer, and a channel layer disposed between the first and second dielectric layers. The semiconductor structure further comprises a first source/drain region disposed on a first side of the gate structure and in electrical contact with a first end portion of the multi-layer channel stack and a second source/drain region disposed on a second side of the gate structure and in electrical contact with a second end portion of the multi-layer channel stack.

Semiconductor structure having two-dimensional channel

Embodiments herein describe FETs with channels that form wrap-around contacts (a female portion of a female/male connection) with metal contacts (a male portion of the female/male connection) in order to connect the channels to the drain and source regions. In one embodiment, a first conductive contact is formed underneath a dummy channel. In addition an encapsulation material wraps around the first conductive contact. The dummy channel and the encapsulation material can then be removed and replaced by the material of the channel which, as a result, include a female portion that wraps around the first conductive contact.

Embodiments of the present invention are directed to fabrication methods and resulting structures that provide metal gate N/P boundary control in an integrated circuit (IC) using an active gate cut and recess processing scheme. In a non-limiting embodiment of the invention, a gate cut is formed in an N/P boundary between an n-type field effect transistor (FET) and a p-type FET. A first portion of a first work function metal is removed over a channel region of the n-type FET. The gate cut prevents etching a second portion of the first work function metal. The first portion of the first work function metal is replaced with a second work function metal. The gate cut is recessed, and a conductive region is formed on the recessed surface of the gate cut. The conductive region provides electrical continuity across the N/P boundary.

Metal gate N/P boundary control by active gate cut and recess

An apparatus that includes a substrate divided into a plurality of different regions, where the substrate remains physically together. A first device located in a first region of the plurality of different regions, where the first device has a first height. A second device located in a second region of the plurality of different regions. The second device has a second height and the second device is a different device from the first device. A third device located in a third region of the plurality of different regions. The third device has a third height and the third device is a different device from the first device and the second device. The second height is smaller than the first height.

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Halfmoon, NY, United States of America

Andrew Gaul