Other

Andrew Fahrland

Manish P Gupta

Deran Maas

Daniele Angelosante

Douglas Steven Baer

John Brian Leen

Elena S F Berman

A method of processing raw measurement data from a tunable diode laser absorption spectroscopy (TDLAS) tool or other spectroscopic instrument is provided that determines what types of noise (electronic or process flow) are present in the measurement. Based on that determination, the noise is reduced by performing a weighted averaging using weights selected according to the dominant type of noise present, or a general case is applied to determine weights where neither noise type is dominant. The method also involves performing continuous spectroscopy measurements with the tool, with the data and weighted averaging being constantly updated. Weighting coefficients may also be adjusted based on similarity or difference between time-adjacent traces.

Optimal weighted averaging pre-processing schemes for laser absorption spectroscopy

A method for spectral interpretation in absorption spectroscopy uses a nonlinear spectral fitting algorithm for interpretation of spectral features in complex absorption spectra. The algorithm combines two spectral modeling techniques for generating spectral models to be used in the curve fitting process: a line-shape model and a basis-set model. The selected models for all gas components are additively combined using a least squares minimization, allowing for quantification of multiple species simultaneously.

Spectral modeling for complex absorption spectrum interpretation

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Sunnyvale, CA, United States of America

Andrew Fahrland