Watlow Electric Manufacturing Company

Andrew D Selvy

Miranda Pizzella

Mark Denis Everly

Paul Douglas Free

Daniel Gander

Cory Brandes

Chelsea Diestelkamp

Jeffrey R Diestelmeier

Chelsea Hogard

Robert E Johnston

Jeffrey Diestelmeier

A method for monitoring a semiconductor processing system including a gas delivery system, a thermal system, and a fluid flow line includes obtaining a plurality of operational data from the gas delivery system, the thermal system, or a combination thereof and determining a performance characteristic of the fluid flow line based on one or more operational data of the plurality of operational data. The method includes identifying one or more locations associated with the one or more operational data in a reference virtual model and generating a dynamic state model of the fluid flow line based on the reference virtual model, the one or more identified locations, and the determined performance characteristic, where the dynamic state model is a digital representation of the fluid flow line.

Control and monitoring system for gas delivery system

A method of detecting a leak-induced abnormal condition in a fluid line system having a plurality of heaters includes determining a plurality of temperature characteristics at a plurality of locations of the fluid line system, where each temperature from among the plurality of temperature characteristics is associated with at least one heater from among the plurality of heaters and monitoring, for each of the plurality of heaters, an electrical characteristic of the heater. The method includes determining the leak-induced abnormal condition is present within the fluid line system in response to the electrical characteristic of a given heater from among the plurality of heaters and the temperature characteristic associated with the given heater satisfying a temperature-and-electrical characteristics (TEC) deviation condition and performing a corrective action in response to determining the leak-induced abnormal condition is present.

Method and system for detecting and diagnosing fluid line leakage for industrial systems

The present disclosure provides a method of treating a diesel exhaust system that includes heating a reagent to a temperature such that at least a portion of the reagent is heated to a gaseous phase, injecting the reagent into a diesel exhaust stream upstream of a catalyst, and reacting the diesel exhaust with the heated reagent over the catalyst to convert NOinto Nand HO. The heating modulates a mass flow rate of the reagent by converting a state of matter of the reagent at least partially to the gaseous phase prior to or after being injected, and the heated reagent in the gaseous form reduces deposit formations within the diesel exhaust system.

Temperature-based control of reagent distribution

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O'Fallon, MO, United States of America

Andrew D Selvy