Murata Manufacturing Co., Ltd.

USA As Represented by Secretary of the Navy

Resonant, Inc.

Andrew C Guyette

Neal O Fenzi

Bryant Garcia

Greg Dyer

Sean McHugh

Eric J Naglich

Pintu Adhikari

Patrick J Turner

Wei Yang

Michael Eddy

Luke Myers

Dylan J Kelly

Marie Chantal Mukandatimana

Ventsislav Yantchev

Viktor Plesski

Robert B Hammond

Soumya Yandrapalli

Andrew Kay

Gregory Lynton Hey-Shipton

Jesson John

Albert Cardona

Michael M Eddy

Douglas Jachowski

Garrett Williams

Gregory L Hey-Shipton

Scot Robertson

Gregory Dyer

Chris O′Brien

Sanghoon Shin

Filter devices are disclosed. A filter device includes a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm. The supported portion is attached to a substrate and the first and second diaphragms spans respective cavities in the substrate. A first interdigital transducer (IDT) has interleaved fingers on the first diaphragm. A second interdigital transducer (IDT) has interleaved fingers on the second diaphragm. A first dielectric layer is between the interleaved fingers of the first IDT, and a second dielectric layer is between the interleaved fingers of the second IDT. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. The piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to first and second IDTs excite primary shear acoustic modes in the respective diaphragms.

Filter device

An acoustic resonator device includes a substrate having a surface and a single-crystal piezoelectric plate bonded to the substrate surface. A portion of the piezoelectric plate forms a diaphragm that spans a cavity. A conductor pattern including an interdigital transducer (IDT) formed on a surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. A dielectric cover is disposed over the IDT and the plate, and the dielectric cover forms an air gap above the IDT and the plate.

Transversely-excited film bulk acoustic resonators wafer-level packaging using a dielectric cover

Radio frequency filters. A radio frequency filter includes a substrate attached to a piezoelectric plate, portions of the piezoelectric plate forming a plurality of diaphragms spanning respective cavities in the substrate. A conductor pattern formed on the piezoelectric plate includes a plurality of interdigital transducers (IDTs) of a respective plurality of resonators, interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms. The conductor pattern connects the plurality of resonators in a matrix filter circuit including a first sub-filter and a second sub-filter, each sub-filter comprising two or more resonators from the plurality of resonators.

Transversely-excited film bulk acoustic resonator matrix filters

A 6 GHz Wi-Fi bandpass filter includes a ladder filter circuit with two or more shunt transversely-excited film bulk acoustic resonators (XBARs) and two or more series XBARs. Each of the two or more shunt XBARS includes a diaphragm having an LN-equivalent thickness greater than or equal to 310 nm, and each of the two or more series XBARS includes a diaphragm having an LN-equivalent thickness less than or equal to 305 nm.

Filter using transversely-excited film bulk acoustic resonators

Acoustic filters are disclosed. A bandpass filter has a passband between a lower band edge and an upper band edge. The bandpass filter includes a plurality of transversely-excited film bulk acoustic resonators (XBARs) connected in a ladder filter circuit. The plurality of XBARs includes at least one lithium tantalate XBAR and at least one lithium niobate XBAR.

Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators

Filter devices and methods are disclosed. A single-crystal piezoelectric plate is attached to substrate, portions of the piezoelectric plate forming a plurality of diaphragms spanning respective cavities in the substrate. A conductor pattern formed on the piezoelectric plate defines a low band filter including low band shunt resonators and low band series resonators and a high band filter including high band shunt resonators and high band series resonators. Interleaved fingers of interdigital transducers (IDTs) of the low band shunt resonators are disposed on respective diaphragms having a first thickness, interleaved fingers of IDTs of the high band series resonators are disposed on respective diaphragms having a second thickness less than the first thickness, and interleaved fingers of IDTs of the low band series resonators and the high band shunt resonators are disposed on respective diaphragms having thicknesses intermediate the first thickness and the second thickness.

Multi-port filter using transversely-excited film bulk acoustic resonators

A 5 GHz Wi-Fi bandpass filter includes a ladder filter circuit with two or more shunt transversely-excited film bulk acoustic resonators (XBARs) and two or more series XBARs. Each of the two or more shunt XBARS includes a diaphragm having an LN-equivalent thickness greater than or equal to 360 nm, and each of the two or more series XBARS includes a diaphragm having an LN-equivalent thickness less than or equal to 375 nm.

Communications devices are disclosed. A communications device includes an unlicensed national information infrastructure frequency range 1 (U-NII-1) to U-NII-2A transceiver coupled to a first antenna though a U-NII-1 to U-NII-2A coexistence filter, and a U-NII-2C to U-NII-8 transceiver coupled to a second antenna though a U-NII-2C to U-NII-8 coexistence filter.

Communications device with concurrent operation in 5GHZ and 6GHZ U-NII frequency ranges

An acoustic filter device includes a transversely-excited film bulk acoustic resonator (XBAR) including a plurality of sub-resonators, and conductors connecting the plurality of sub-resonators in series between a first node and a second node. At least one of the conductors connects two of the plurality of sub-resonators and has a shape that minimizes an area of the at least one conductor.

Layout of xbars with multiple sub-resonators in series

Tiled filters are disclosed. A filter includes an n×m array of sub-filters, where n is a number of sub-filters in parallel and m is a number of sub-filters in series. n and m are non-zero positive integers and at least one of n and m is greater than one. All of the nm sub-filters are bandpass filters with substantially the same passbands.

Tiled transversely-excited film bulk acoustic resonator high power filters

A radio frequency filter includes at least a first sub-filter and a second sub-filter connected in parallel between a first port and a second port. Each of the sub-filters has a piezoelectric plate having front and back surfaces, the back surface attached to a substrate, and portions of the piezoelectric plate forming diaphragms spanning respective cavities in the substrate. A conductor pattern is formed on the front surface of the plate, the conductor pattern includes interdigital transducers (IDTs) of a respective plurality of resonators, with interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms. A thickness of the portions of the piezoelectric plate of the first sub-filter is different from a thickness of the portions of the piezoelectric plate of the second sub-filter.

Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters

Acoustic filter devices and methods of making filter devices. An acoustic filter device includes a transversely-excited film bulk acoustic resonator (XBAR) including a plurality of sub-resonators and conductors to connect the plurality of sub-resonators in parallel between a first node and a second node. The conductors are configured such that a path length from the first node to the second node is effectively the same through each of the plurality of sub-resonators.

Layout of XBARs with multiple sub-resonators in parallel

A filter device has a first piezoelectric plate spanning a first and second cavity of a substrate. A first and second interdigital transducer (IDT) are on a front surface of the first piezoelectric plate over the first and second cavity. A dielectric layer is bonded to the first piezoelectric plate and covers the first IDT and second IDT. A second piezoelectric plate is bonded to a front surface of the dielectric layer over the first cavity and the second cavity. A second dielectric layer is formed on a front surface of the second piezoelectric plate over the first cavity but not over the second cavity. The thickness of the dielectric layer, the first piezoelectric plate and the second piezoelectric plate can be selected to tune a shunt resonator over the first cavity and a series resonator over the second cavity to function at 15 GHz.

Sandwiched XBAR for third harmonic operation

Acoustic filters are disclosed. A bandpass filter has a passband between a lower band edge and an upper band edge. The bandpass filter includes a plurality of transversely-excited film bulk acoustic resonators (XBARs) connected in a ladder filter circuit. The plurality of XBARs includes at least one lithium tantalate (LT) XBAR and at least one lithium niobate XBAR. Each of the at least one LT XBAR includes an LT piezoelectric plate with Euler angles (0°, β, 0°), where β is greater than zero and less than or equal to 40 degrees.

Filter using lithium niobate and rotated lithium tantalate transversely-excited film bulk acoustic resonators

There are disclosed acoustic diplexers and radios incorporating the acoustic diplexers. A diplexer includes common port, a low band port, a high band port, n low band sub-filters, and n high band sub-filters, where n is an integer greater than one. Each low band sub-filter has a first sub-filter port connected to the common port and a second sub-filter port connected to the low band port. Each high band sub-filter has a first sub-filter port connected to the common port and a second sub-filter port connected to the high band port. A first acoustic resonator is connected from the common port to ground and a second acoustic resonator is connected from the low band port to ground. The first and second acoustic resonators are configured to create respective transmission zeros adjacent to a lower edge of a passband of the diplexer.

Growing community of inventors

Alexandria, VA, United States of America

Andrew C Guyette