Brooks Instrument, LLC

Illinois Tool Works Inc.

Andrew C Dymek

John R Laverack

Jay J Mendelson

Doug B Winner

Joseph Corrado

Joseph C Dille

Scott E Shirey

Sean C Dunn

The disclosed embodiments include a valve assembly () that includes a piezo stack (); a piezo actuator () encompassing the piezo stack, the piezo actuator having flexural elements () that provide a stroke multiplier that amplifies movement of the piezo stack; a valve block () having an inlet flow path () and an outlet flow path (); a diaphragm () seated atop the valve block, wherein an outer part of the diaphragm is rigid and an inner part of the diaphragm is moveable in a vertical axis; and a bi-lateral flexure (), wherein a bottom part of the piezo actuator is mechanically attached to the diaphragm via the bi-lateral flexure.

Piezo actuator type valve

Mass flow controller

Growing community of inventors

Ivyland, PA, United States of America

Andrew C Dymek