Texas Instruments Corporation

Other

Andrew A Amatruda

Larry K Johnson

Robert O Southworth

Eric P Reidemeister

William Silva

Michael D Gouin

Sheldon S White

Steven Beringhause

Karl R Abrahamson

Edwin C Ballard

A capacitive fluid pressure sensor (,) particularly adapted for use with fluids which are incompatible with conventional elastomeric fluid seals is shown in which a thin, relatively flexible metal diaphragm (,) is disposed over a fluid pressure receiving recess (16,, 16,) formed in a bottom wall of a hexport housing (,) and hermetically attached thereto. A capacitive sensor element (,) having a pressure sensitive surface (,) is disposed in the housing with the pressure sensitive surface placed against the metal diaphragm with a plastic intermediate layer (,) disposed between the metal diaphragm and the sensor element to minimize hysteresis and output error. The metal diaphragm and plastic layers are shown to be flat members in certain embodiments (,and,) and corrugated in another embodiment (,).

Hermetically sealed pressure sensing device

An acceleration sensor is shown having a substrate (16, 16', 16', 16'') on which a capacitor detect plate (24) and source plate mounting portion (28c) are disposed. An electrically conductive blade member (40, 44) having an attachment portion (40a, 44h), a source plate portion (40i, 44a) and integrally attached beams (40b, 40c; 44b) extending along opposite sides of the blade member is mounted on the substrate by welding the attachment portion to a mounting element (36, 36', 36', 36'') which is closely received in a bore (32, 32', 32', 32'') formed through the substrate at the source plate mounting portion. The mounting element or the bore is formed with a surface suitable for forming an interference fit and for making electrical engagement with a conductive layer received in the bore. The mounting element has one end (36b, 36b', 36b') which extends above the top surface (26, 26') an adjustable selected amount(s) to provide desired spacing between the source plate portion and the detect plate. A single mounting element of a pair of mounting elements can be used and may be in the form of a solid (36, 36', 36'') or a hollow (36') pin.

Method of making an acceleration sensor

Acceleration sensor apparatus and method for making same

A snap acting control member (10, 10b) having high actuating temperatures comprises metal layers metallurgically bonded together with a low expansion (12) and a relatively high expansion layer (14) each having similar moduli of elasticity and the low expansion layer being formed of a precipitation hardenable stainless steel so that after forming into a dished shaped configuration to make the member snap acting the low expansion layer is heat treated to increase the strength. The control member can be used solely to sense temperature or it can be used as an electrical current carrying member. When used in the latter manner, the electrical resistivity of the member can be adjusted by interposing a selected layer (16) between layers (12) and (14) to thereby increase or decrease the resistivity of the member (10b) depending on the particular metal chosen for the interlayer. An electrical switch (24) is shown in which a snap acting member is used as a sensor and another electrical switch (48) is shown in which the snap acting member is a current carrying member.

High temperature, temperature responsive snap acting control member and

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Attleboro, MA, United States of America

Andrew A Amatruda