Nxp B.v.

Andres Felipe Vasquez Quintero

Klaus Reimann

Remco Henricus Wilhelmus Pijnenburg

Twan Van Lippen

Iris Bominaar-Silkens

A MEMS device, such as a microphone, uses a fixed perforated plate. The fixed plate comprises an array of holes across the plate area. At least a set of the holes adjacent the outer periphery comprises a plurality of rows of elongate holes, the rows at different distances from the periphery. This design improves the mechanical robustness of the membrane and can additionally allow tuning of the mechanical behavior of the plate.

Growing community of inventors

Neuchatel, Switzerland

Andres Felipe Vasquez Quintero