Coherent, Inc.

Andrei Staroudoumov

Andrea Caprara

Norman Hodgson

Luis A Spinelli

Laser apparatus including two different, pulsed MOPAs, one having a fundamental wavelength of 1064 nm and the other having a fundamental wavelength of 1547 nm, provide trains of optical pulses. The 1064-nm pulses are frequency-quadrupled to a wavelength of 266 nm. The 1547-nm pulses are first mixed with the 266-nm pulses to provide pulses having a wavelength of 227 nm. The 227-nm pulses are then mixed with residual 1547-nm pulses from the first mixing to provide 198-nm output pulses of the apparatus.

MOPA laser apparatus with two master oscillators for generating ultraviolet radiation

Laser apparatus including two different, pulsed MOPAs, one having a fundamental wavelength of 1064 nm and the other having a fundamental wavelength of 1564 nm, provide trains of optical pulses. The 1064-nm pulses are frequency tripled to 355 nm and the 1564-nm pulses are frequency doubled to 782 nm. The 355-nm and 782-nm pulses are mixed to provide 244-nm pulses. The 244-nm pulses are mixed with residual 1064-nm pulses to provide 198-nm output pulses of the apparatus. The output pulses can be either digitally modulated or amplitude modulated by controlling the phase relationship between the 1064-nm and 1564-nm pulses.

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Cupertino, CA, United States of America

Andrei Staroudoumov