Robert Boschgmbh

Andreas Thomae

Markus Lutz

Lothar Diehl

Karsten Funk

Reinhard Neul

Burkhard Kuhlmann

Jochen Franz

Joerg Hauer

Wolfram Bauer

Christian Doering

Rainer Willig

Udo Bischof

Udo-Martin Gomez

Rolf Becker

Holger Reinshagen

Michael Fehrenbach

Gerhard Wucher

Siegbert Goetz

Ulrich Goebel

Georg Bischopink

Johannes Artzner

Goetz Reinhardt

Henrico Runge

Andreas Fischer

Juergen Schwaiger

Udo Gomez

An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

Micromechanical rotational rate sensor

A yaw-rate sensor is proposed having a first and a second Coriolis element ( ) which are arranged side-by-side above a surface ( ) of a substrate. The Coriolis elements ( ) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements ( ) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements ( ) are coupled by a spring ( ) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Rotation speed sensor

A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

Rotation rate sensor

An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

Rotational speed sensor

In the method and device for tuning a first oscillator with a second oscillator respective response signals of the first oscillator are produced from corresponding frequency-shifted and/or phase-shifted signals of the second oscillator. The first oscillator is tuned to the second oscillator according to the difference of the respective response signals. For amplitude correction a quotient is formed by dividing an output signal by the sum of the response signals. The method and device according to the invention are especially useful in a rotation rate sensor. The invention also includes a rotation rate sensor, which includes a device for determining rotation rate from the oscillations of a first and second oscillator and the device for tuning the first oscillator with the second oscillator.

Method and device for tuning a first oscillator with a second oscillator and rotation rate sensor

In a method for producing a pressure sensor, a ceramic plate is joined to a shaped ceramic part. The shaped ceramic part has a depression. Around the depression there is provided a thick-layer paste which does not completely surround the depression. As a result, the air can escape from the depression during firing and a subatmospheric pressure can thus be enclosed in the depression.

Method for producing a pressure sensor

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Tuebingen, Germany

Andreas Thomae