Carl-zeiss-smt Ag

Carl Zeiss Smt Gmbh

Andreas Seifert

Wolfgang Singer

Frank Melzer

Markus Weiss

Andreas Heisler

Martin Antoni

Stefan Dornheim

Hubert Holderer

Heinz Mann

Bernhard Gellrich

Bernhard Geuppert

Joachim Hartjes

Berndt Warm

Wilhelm Egle

Guenther Dengel

Rutger Wevers

Jurgen Faltus

Jürgen Faltus

A mirror with a mirror carrier, as well as related apparatuses, systems and methods are disclosed. The mirror carrier can be embodied as cooling device with at least one cooling channel. Tube connections can be provided to connecting the at least one cooling channel to an inlet and an outlet of coolant. Sealing elements for a gas-tight and liquid-tight seals can be arranged between the tube connections and the mirror carrier. The field of application of the mirror can be, for example, an illumination device of a projection exposure apparatus.

Mirror with a mirror carrier and projection exposure apparatus

A focusing-device for the radiation from a light source () is provided with a collector mirror (') which is arranged in a mount () and collects the light, in virtual or real terms, from the light source () at the second focus (). The collector mirror (&#x2032;) is displaceably connected to the mount () via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.

Focusing-device for the radiation from a light source

A faceted mirror apparatus includes a support plate having a plurality of stepped reception bores into which are fitted the base portions of respective ones of a plurality of mirror facets having mirrored surfaces. An outer surface of each of the facets bears on an inner wall to provide a stable alignment of the optical axes of the mirrored surfaces such that the apparatus generates a beam of rays from impinging rays.

Faceted mirror apparatus

A facet mirror () is provided with a number of mirror facets (), in which the mirror facets () respectively have a spherical or conical facet body () with a reflecting surface (). The side of the facet body () averted from the reflecting surface () is mounted in a bearing device ().

Facet mirror having a number of mirror facets

In a method for the production of a facetted mirrorhaving a plurality of mirror facetsand', which have mirror surfacesand are fitted into reception bores&#x2032; of a support platethe mirror facets&#x2032; are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet&#x2032; fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet&#x2032; in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.

Method for the production of a facetted mirror

In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.

A focusing-device for the radiation from a light source, in particular a laser plasma source, has a collector mirror which collects the light from the light source at a second focus in virtual or real terms, in particular for micro-lithography using EUV radiation, and a routing unit and downstream beam formation in an illuminating system. The collector mirror can be displaced in the z-direction (optical axis) and is designed and/or mounted in such a way that the position of the second focus remains unchanged in the event of temperature changes.

Growing community of inventors

Aalen, Germany

Andreas Seifert