Average Co-Inventor Count = 8.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (1 from 1,405 patents)
1 patent:
1. 8279402 - Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same