Balzers Und Leybold Deutschland Holding Ag

Leybold Aktiengesellschaft

Leybold Systems Gmbh

Beybold Systems Gmbh

Andreas Sauer

Manfred Schuhmacher

Dietmar Marquardt

Joachim Szczyrbowski

Hans Kunz

Johannes Kunz

Erwin Winter

Gerhard Joos

Katja Grundmann

A gate valve (,) is constructed for the simultaneous blocking or clearing of two rectangular passage openings (,) of two chamber walls (,) that are provided between two vacuum chambers (,) and aligned with one another. To this end, it has two valve plates (,), which are a component of a slider (,), which is situated so that it can move with play from a position clearing the passage openings (,) to a position which closes the passage openings (,). To move the valve plates (,) to the closing setting against the passage openings (,) on the slider (,), at least one lifting element (,), which is acted on by pressure, is provided.

Gate valve

A device for coating plate-shaped substrates by using cathode sputtering has several process chambers one after the other, each of which are bordered on the top by a chamber roof having in each case an opening. In this opening, which is covered at the top by a cathode arrangement, a frame is inserted. Screens and coolant lines of the process chamber are provided on the frame that can slide upwards out of the opening, projects into the process chamber, and is supported inside the opening of the chamber roof. A top of the cathode arrangement projects over the frame on the sides and is supported directly on the chamber roof so it seals it.

Device for coating plate-shaped substrates

A dual magnetron cathode assembly includes a pair of elongate, parallel targets in coplanar relationship fixed to respective magnetic yokes with associated rows of permanent magnets for producing a magnetic field over the targets. A common back plate is provided for both cathodes, a center shield plate extending from the back plate to between the targets, side shield plates and end shield plates likewise extending from the back plate to form side-by-side rectangular shielding enclosures which expose only the sputtering surface of the targets. The yokes are fixed with respect to the vacuum chamber by insulative holders which extend through openings in the back plate.

Dual target cathode assembly with shielding

Hollow members having conduits for process gas and coolant are mounted in parallel on sidewall of a vacuum chamber with a sputtering cathode therebetween. Anode members having an L-shaped cross section are mounted over the hollow members and held in place by thumb screws in threaded bores of strips fixed to the chamber walls above the hollow members. Mask members having a Z-shaped cross section are mounted over the anodes and are also held in place by the thumb screws.

Apparatus for applying thin layers to a substrate

A pair of parallel elongate targets are fixed with respect to respective plates mounted in a vacuum chamber by means of clamps arranged along the longitudinal sides of each target, and an expandable wedge system between the rear plate and magnetic yokes on the backs of the targets. The wedge system for each target includes a wedge block having ramped surfaces which face outward, a pair of wedge jaws having ramped surfaces which slide against the ramped surfaces of the block, and a screw which draws the jaws together against the ramped surfaces of the block to expand the system and force the plate away from the yoke and fix the entire assembly in the clamps.

Growing community of inventors

Aschaffenburg, Germany

Andreas Sauer