Infineon Technologies Ag

Andreas Rusch

Yoichi Otani

Hans-Joachim Barth

Thomas B&ouml;hm

Armin Kohlhase

Ulrich Zimmermann

Manfred Hain

Volker Weinrich

Till Schl&ouml;sser

Klaus Schruefer

Klaus Schrüfer

Steffen Rothenhäusser

Jens Moeckel

Alexander Tr&uuml;by

An electronic circuit arrangement in accordance with some embodiments has a substrate, the substrate including: a plurality of metallization layers located one above the other; a single fuse-link via coupled between a first metallization layer and a second metallization layer of the plurality of metallization layers, wherein the single fuse-link via is in the form of an electrical fuse link preferentially programmable by applying a sufficiently large current to melt or degenerate the fuse link; a plurality of through-contact vias coupled in parallel between a third metallization layer and a fourth metallization layer of the plurality of metallization layers, wherein the through-contact vias form a through-contact between the third and fourth metallization layers; and electrical circuit components, arranged in a circuit layer, which are electrically coupled to one another by means of the single fuse-link via and by means of the plurality of through-contact vias.

Electronic circuit arrangement

An electronic circuit arrangement has a substrate which has at least one metallization layer. At least one electrical interconnect and/or at least one via are formed in the metallization layer such that the electrical interconnect and the via are in the form of an electrical fuse link. In addition, the substrate has electrical circuit components which are arranged in the circuit layer. The circuit components are electrically coupled to one another by means of the electrical interconnect and by means of a plurality of vias.

Electronic circuit arrangement with an electrical fuse

A method for fabricating a semiconductor memory device is described. An insulating layer is disposed on a semiconductor substrate. A matrix of semiconductor memory elements is disposed in the substrate. The semiconductor memory elements include a plurality of contact holes formed in the insulating layer. One contact hole is formed in the insulating layer for each of the semiconductor memory elements. A bit definition region is disposed in the semiconductor substrate underneath each of the contact holes. A contact plug is disposed in each of the contact holes and is in electrical contact with the bit definition region. The bit definition region is configured such that a contact resistance between the semiconductor substrate and the contact plug defines a bit to be stored in the semiconductor memory elements, An evaluation circuit is connected to and evaluates the contact resistance of the semiconductor memory elements.

Method of making a semiconductor memory device

A configuration of fuses in a semiconductor structure having Cu metallization planes is provided. The semiconductor structure has an Al metal layer on the topmost interconnect plane for providing Al bonding pads. The fuses are configured as Al fuses and, in the semiconductor structure having Cu metallization planes, are provided above the diffusion barrier of the topmost Cu metallization plane but below a passivation layer.

Configuration of fuses in semiconductor structures with Cu metallization

The memory cell configuration has a large number of memory cells provided in a semiconductor substrate and having bit-line trenches which extend in parallel in the longitudinal direction in the main face of the semiconductor substrate, at the bottoms of which in each case a first conductive region is provided, at the peaks of which in each case a second conductive region of the same conduction type as the first conductive region is provided, and in the walls of which in each case an intermediately located channel region is 0 provided; and having word lines which extend in the transverse direction along the main face of the semiconductor substrate, through specific bit-line trenches, to activate transistors provided there. An additional dopant is introduced into the trench walls of the bit-line trenches which are located between the word lines, in order to increase the corresponding transistor turn-on voltage there to suppress leakage currents.

Memory cell configuration and corresponding production process

The memory cell configuration has a multiplicity of preferably ferroelectric memory cells in a semiconductor substrate. Mutually parallel bit line trenches run in the longitudinal direction in the main surface of the semiconductor substrate. Bit lines are disposed in the bottoms of the trenches. Source/drain regions are formed in the crowns of the trenches. Channel regions are provided in the walls of the trenches. The channel region on a wall in each case is configured such that a drivable selection transistor of the relevant memory cell is formed there, while the channel region on the other wall is configured such that the transistor located there is closed. Insulated word lines for driving the selection transistors run in the transverse direction along the main surface of the semiconductor substrate through the bit line trenches. Insulation trenches for insulating the source/drain regions in the longitudinal direction of neighboring memory cells run in the transverse direction in the main surface of the semiconductor substrate. A respective, preferably ferroelectric, capacitor is connected to the source/drain region of the respective memory cell and is arranged above the word lines.

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Hohenbrunn, Germany

Andreas Rusch