Aixtron Se

Koninklijke Philips Corporation N.V.

Andreas Poqué

Michael Long

Claudia Cremer

Karl-Heinz Trimborn

Birgit Irmgard Beccard

Georg Greuel

Wolfgang Schiene

Michael Schaaf

Andy Eichler

In a device and a method for generating vapor in a CVD or PVD device, particles are vaporized by bringing the particles into contact with a first heat transfer surface of a vaporization device. The vapor generated by vaporizing the particles is transported by a carrier gas out of the vaporization device and into a single or multistage modulation device. In a vapor transfer phase, second heat transfer surfaces of the modulation device are adjusted to a first modulation temperature, at which the vapor passes through the modulation device without condensing on the second heat transfer surfaces. At an intermission phase, the second heat transfer surfaces are adjusted to a second modulation temperature, at which at least some of the vapor condenses on the second heat transfer surfaces.

Apparatus and method for generating a vapor for a CVD or PVD device

In a device for generating a vapor for a CVD or PVD apparatus, at least two thermal transfer bodies are arranged successively in the direction of flow of a carrier gas. The device also includes an inlet pipe for feeding an aerosol to one of the thermal transfer bodies for vaporization of the aerosol by bringing the aerosol particles into contact with thermal transfer surfaces of the thermal transfer body. At least one of the thermal transfer bodies has an opening for an inlet pipe that has a first flow channel for feeding the aerosol in and a second flow channel for feeding a carrier gas in. Gas passage openings are provided through which the carrier gas flows out of the second flow channel into the first flow channel. The second flow channel is sealed in the area of the mouth of the inlet pipe.

Device for generating vapor from solid or liquid starting material for CVD or PVD apparatus

A lamp holder for a dielectric barrier discharge (DBD) lamp (), especially for use in a treatment system or reactor or housing or in an irradiation apparatus, for radiating a medium like a fluid and/or a gas and/or a solid material by means of the DBD lamp () is disclosed. The holder substantially comprises two end caps () at the axial ends of the lamp () and an inner electrode () with a screw fitting (SF) for exerting an axial pressure on both axial ends of the lamp (I) via both end caps () and with axial bores () into an inner volume () for guiding especially a cooling medium and for electrically contacting an inner tube (II) of the lamp (). The holder has a comparatively simple construction and can easily be assembled. Furthermore, even larger tolerances of the lamp length can be compensated and a reliable sealing of the inner volume () against the outside of the lamp () is achieved.

Lamp holder for a dielectric barrier discharge lamp

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Aachen, Germany

Andreas Poqué