Oerlikon Surface Solutions Ag, Pfaffikon

Andreas Peter Treuholz

Siegfried Krassnitzer

Juerg Hagmann

Jürg Hagmann

Dominik Erwin Widmer

A cathodic arc evaporation apparatus including

Cathodic arc source

An arc ignition device for cathodic arc deposition of a target material onto a substrate, comprising a trigger finger arranged moveable between a contacting position and a resting position, wherein in the contacting position a side surface of an adjacent target can be physically contacted by the trigger finger, and in the resting position the adjacent target cannot be contacted by the trigger finger, wherein during cathodic arc deposition of a target material, the trigger finger is arranged movable between the contacting position and the resting position in such a way that the contamination of the trigger finger with deposited target material during the cathodic arc deposition of the target material can be minimized.

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Bad Ragaz, Switzerland

Andreas Peter Treuholz