Ketek Gmbh Halbleiter-und Reinraumtechnik

Andreas Pahlke

Michael Bachmann

Felix Düsberg

Florian Schneider

In an embodiment an X-ray source includes an electron source configured to emit electrons, an acceleration set-up configured to accelerate the emitted electrons and a transmission window downwards of the acceleration set-up, wherein the transmission window is configured to let through X-rays generated by the accelerated electrons, wherein the transmission window is located either in a straight extension of a line-of-flight of the accelerated electrons or off the line-of-flight and past the acceleration set-up, wherein the transmission window comprises a carbon carrier, and wherein the carbon carrier comprises sp2-hybridized carbon.

X-ray source

In at least one embodiment an X-ray source includes an electron source configured to emit electrons, an acceleration set-up configured to accelerate the emitted electrons and a transmission window downwards of the acceleration set-up, the transmission window configured to let through X-rays generated by the accelerated electrons, wherein the transmission window incudes a carbon carrier, and wherein the carbon carrier includes sp2-hybridized carbon.

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Brunnthal, Germany

Andreas Pahlke