Festo Ag & Co

Andreas Muth

Kurt Stoll

Michael Weinmann

Metin Giousouf

Peter Post

Herbert Vollmer

Stefan-Johannes Demuth

Peter Waiblinger

Bernd Beuth

Jari Haajo

An electrostatic microvalve has a partition dividing a first and a second valve chamber from each other and having a through duct extending through it, such through duct opening at a first and a second opening into the first and the second valve chamber. In the first valve chamber there is a valve member for the control of first duct opening. In the second valve chamber there is a control member, using which the second duct opening may be at least partly closed in order to reduce the flow force acting on the valve member so that the valve member may be switched over with a smaller electrostatic force into a closed position closing the first duct opening

Electrostatic microvalve and a method for the operation thereof

A fluid power operate linear drive possessing a slab housing ( ) with an elongated cross sectional outline, in which a plurality of receiving spaces ( ) are arranged extending in a common housing plane adjacent to each other in the direction of the longitudinal axis ( ) of the cross section. At one first narrow side ( ) of the housing there is a piston receiving space ( ) extending in the longitudinal direction containing a piston ( ) connected with an outwardly running force output part ( ). At the opposite second narrow housing side ( ) there is an electronic circuitry receiving space ( ) containing electronic valve control circuitry ( ). Between the piston receiving space ( ) and the electronic circuitry receiving space ( ) there is at least one valve receiving space ( ), which contains a control valve means ( ), which is able to be electronically operated and serves for the control of fluid actuation of the piston ( ).

Fluid-actuated linear drive

A fluid power operative instrumentality having an electro-fluidic control unit, which is provided with a plurality of electrically activated control valves having 2/2 valve functions. On the control unit different operative units may be selectively mounted, the control valves being able to be operated by means of electronic control circuitry in a manner matching the mounted operative unit.

Fluid power operative instrumentality

A microvalve, which contains a valve member ( ) dividing a valve chamber ( ) into two chamber parts ( and ). A first chamber part ( ) is delimited by a duct layer ( ), which has an input flow opening ( ) and at least one output flow opening ( and ). Fluid transfer between the input flow opening ( ) and the output flow opening ( and ) may be controlled by the valve member ( ). Furthermore pressure relieving means are provided which are effective in the open position of the valve member ( ), such means comprising at least one expansion recess ( ) provided on the valve member and with at least partial overlap opposite to the output flow opening ( and ), same permitting an expansion of the transferring fluid. It is connected through valve member ( ) with the second chamber part ( ) so that a counter pressure may build up here causing the relief of pressure.

Microvalve

A valve means ( ) containing a switching element in the form of a switching rocker member ( ). The rocking arms ( and &prime;) placed on either side of the pivotal portion ( ) of the switching rocker member ( ) are respectively engaged by a respective actuating diaphragm ( and &prime;) and adjacent thereto there is a closure portion ( and &prime;) associated with a duct opening ( and ). A valve means designed in this manner renders possible a particularly flat, planar structure with compact dimensions and a small dead volume.

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Kirchheim, Germany

Andreas Muth