Infineon Technoloiges Ag

Andreas Meiser

Rainhald Sander

The invention relates to an electrically programmable memory cell comprising a memory transistor having a source and a drain zone and also a storage electrode and a control electrode, and a selection transistor having a source and a drain zone and also a control electrode, the drain zones of the storage and selection transistors being electrically conductively connected to one another. In this case, the drain zone of the selection transistor has a connection zone and an intermediate zone doped more weakly than the connection zone, the intermediate zone being arranged between the connection zone and a channel zone of the selection transistor and serving, during the programming operation, for taking up a programming voltage and thus for protecting a control electrode insulation layer of the selection transistor.

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Munich, Germany

Andreas Meiser