Robert Boschgmbh

Andreas Krauss

Richard Fix

Tjalf Pirk

Christoph Schelling

Stefan Leidich

Gottfried Flik

Michele Hirsch

Philipp Nolte

Denis Kunz

Kathy Sahner

Michael Badeja

Laura Bohne

Elisabeth Preiss

Tino Fuchs

Friedjof Heuck

Andreas Petersen

Markus Widenmeyer

Janpeter Wolff

Nicola Mingirulli

Robert Bonasewicz

Thomas Teuschel

A method for producing a nanocrystalline, gas-sensitive layer structure. The method for producing a nanocrystalline, gas-sensitive layer structure on a substrate comprises the steps: depositing a base layer made of a base material; depositing a doping layer made of a doping material; repeating the preceding steps; and performing a tempering step, whereby a gas-sensitive, nanocrystalline layer structure is produced.

Method for producing a nanocrystalline, gas-sensitive layer structure

At least one semiconductor component is packaged by covering at least one partial surface of the at least one semiconductor component with at least one chemically or physically dissoluble sacrificial material; surrounding the at least one semiconductor component at least partially with a photoablatable packaging material; exposing the sacrificial material on the at least one partial surface of the at least one semiconductor component at least partially by forming at least one trench through at least the packaging material using a light beam; and exposing the at least one partial surface of the at least one semiconductor component at least partially by at least partially removing the previously exposed sacrificial material using a chemical or physical removal method to which the packaging material has a higher resistance than the sacrificial material.

Method for packaging at least one semiconductor component and semiconductor device

A gas sensor, having: a substrate; a heatable membrane configured on a substrate front side of the substrate; at least three electrodes disposed on a membrane surface of the membrane; a first coating configured on an area of the membrane surface, at least two of the at least three electrodes contacting the first coating; a second coating configured on the first coating and on an area of the membrane surface, at least two of the at least three electrodes contacting the second coating, and at least one of the at least two electrodes that contact the second coating being different from the at least two electrodes that contact the first coating.

Production method for a gas sensor and corresponding gas sensor

A method for determining the carbon dioxide content in ambient air includes providing a mobile data transmission device which comprises a sensor configured to detect carbon dioxide in ambient air. The method further includes calibrating the sensor. Calibrating the sensor includes measuring the carbon dioxide content of the ambient air in a reference situation. The method also includes measuring the carbon dioxide content of the ambient air using the sensor.

Method and device for determining the carbon dioxide content in ambient air

A micromechanical sensor device and a corresponding manufacturing method. The micromechanical sensor device is equipped with a substrate which includes a diaphragm area, multiple sensor layer areas being formed on the diaphragm area, which have a particular structured sensor layer; and a particular electrode device, via which the sensor layer areas are electrically connectable outside of the diaphragm area, the sensor layer areas being structured in such a way that they have length and width dimensions of a magnitude between 1 and 10 micrometers.

Method for manufacturing a micromechanical sensor device and corresponding micromechanical sensor device

A measuring device for determining a gas concentration includes a gas-sensitive element, a sensing device, a stimulation unit, and a processing unit. The gas-sensitive element is configured to absorb a gas. The sensing device is configured to determine a parameter of the gas-sensitive element in a predetermined time period, where the parameter depends on an absorbed quantity of the gas. The stimulation unit is configured to stimulate the gas-sensitive element and accelerate desorption of the gas out of the gas-sensitive element. The processing unit is configured to determine a rate of change of the parameter, to control the stimulation such that a concentration of the gas in the gas-sensitive element lies outside of an equilibrium state, and to determine the gas concentration based on the rate of change.

Gas sensor

A method for producing a multi-layer electrode system includes providing a carrier substrate having a recess in a top side of the carrier substrate. At least one wall of the recess is inclined in relation to a bottom side of the carrier substrate, which is opposite to the top side. The method also includes applying a multi-layer stack, which includes at least a first electrode layer, a second electrode layer, and a piezoelectric layer arranged between the first electrode layer and the second electrode layer, to the top side of the carrier substrate. At least the wall and a bottom of the recess are covered by at least a portion of the multi-layer stack.

Method for producing a multi-layer electrode system

A sensor array and a method are provided for operating a sensor array with a first sensor and a second sensor, the second sensor being designed for an operation at an ambient temperature, the first sensor representing a heated sensor, which is designed for being operated at an operating temperature that is above the ambient temperature, the first and the second sensor being connected to each other via a carrier, the carrier bringing about thermal coupling between the first and the second sensor, the first sensor being heated to the operating temperature during a first phase, and a measurement being carried out by the first sensor during the first phase, the heating being switched off or at least being reduced in a second phase, and a measurement being carried out by the second sensor during the second phase, an increased temperature of the second sensor as a result of the heating during the first phase being taken into account when evaluating the measurement of the second sensor.

Method for operating a sensor array

A method for production of a thin-film battery includes providing a mount structure, applying of a first unmasked flow of a first electrode material to the mount structure in order to form a first electrode layer, applying a second unmasked flow of a battery material in order to form a battery layer, and applying a third unmasked flow of a second electrode material in order to form a second electrode layer. The applying steps are repeated in order to produce a thin-film battery which consists of a plurality of first electrode layers, a plurality of battery layers, and a plurality of second electrode layers.

Method and apparatus for production of a thin-film battery

An outer part for a device which is attachable thereto as a housing and/or an attachment part, a first reflective surface and a second reflective surface being formed on the outer part so that at least one signal emitted by an optical and/or acoustic source is directly or indirectly deflectable onto at least one detector surface of an optical and/or acoustic detector, an optical path being configured as a cavern or continuous recess in the outer part or as a depression of a boundary surface of the outer part, the optical path having at least one opening via which at least one substance is transferable into the optical path, and the at least one signal being deflectable into the optical path to the second reflective surface which is formed at a second end of the optical path with the first reflective surface at a first end of the optical path.

Outer part for a device and device

A microelectrochemical sensor includes an energy supply unit and a sensor unit. The energy supply unit is configured to generate electrical energy using a reference fluid. The sensor unit is configured to determine a concentration difference of a chemical species between a measuring fluid and the reference fluid. The measuring fluid has an unknown concentration of the species, and the reference fluid has a known concentration of the species. The sensor unit is electrically connected to the energy supply unit and is designed to determine the concentration difference using the electrical energy from the energy supply unit.

Microelectrochemical sensor and method for operating a microelectrochemical sensor

A semiconductor substrate-based system for an RFID device, in particular an RFID transponder, having a semiconductor substrate and an electronic circuit system which is structured on the semiconductor substrate is provided. The semiconductor substrate-based system also has a thin-layer battery, likewise structured on the semiconductor substrate, for supplying power to the RFID device. Moreover, an RFID device having a corresponding semiconductor substrate-based system, and a method for manufacturing a corresponding semiconductor substrate-based system are provided.

Semiconductor substrate-based system for an RFID device, RFID device, and method for manufacturing such a semiconductor substrate-based system

A sensor device includes a sensor element configured to detect a measurement value based at least in part upon a physical variable, and a support element configured to support the sensor element. The support element has at least one connection region which is located in a section of the support element, and which is configured to connect the section of the support element to a section of the sensor element such that the sensor element is mounted so as to be movable with respect to the support element.

Sensor device and method for producing a sensor device

A microelectrochemical sensor includes a carrier material composed of a semiconductor substrate, and includes a chemosensitive sensor element. The chemosensitive sensor element is positioned in a first partial region of the carrier material. A heating element is positioned in a region of the chemosensitive sensor element and is configured to regulate a temperature of the chemosensitive sensor element. A microelectronic unit is positioned in a second partial region of the carrier material, and is connected to the chemosensitive sensor element and the heating element via conductor tracks integrated into the carrier material. The microelectronic unit is configured to operate the heating element and the sensor element.

An exhaust gas guide element for conducting at least a portion of an exhaust gas to a sensor for a vehicle. The exhaust gas guide element has a greater extent in a direction of a longitudinal axis than in a direction of a transverse axis, and is gas-permeable along the direction of the longitudinal axis. One end of the gas guide element along the direction of the longitudinal axis is configured as a receiving region, and the opposite end is configured as a measuring region. A sensor can be positioned in the measuring region, and a gas receiving element is positioned in the receiving region.

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Tuebingen, Germany

Andreas Krauss