Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Andreas Goehlich

Claudio Cavalloni

Holger Vogt

Hoc Khiem Trieu

Robert Klieber

Andreas Jupe

Stephane Kuehne

Carole Jonville

A micro-electro-mechanical system (MEMS) chip for measuring a pressure in a pressure space includes a MEMS substrate having a measuring region, a contact-making region connected to the measuring region via lines and having contacts, and a bushing region disposed between the measuring region and the contact-making region. The MEMS substrate defines a cavity formed as a blind hole that defines an opening through one side of the MEMS substrate, the bottom of the blind hole forming a membrane. A measuring bridge includes piezoresistive elements disposed on that side of the membrane which faces away from the cavity's opening. A carrier substrate is disposed over the cavity's opening and bonded to the MEMS substrate in a two-dimensional manner to form a rod, with the result that the carrier substrate forms a bottom wall of the cavity spaced apart from the membrane.

MEMS chip, measuring element and pressure sensor for measuring a pressure

Embodiments of the present invention provide a method for manufacturing an integrated sensor structure. In one step, a semiconductor substrate having integrated readout electronics and a metallization structure is provided, the metallization structure including tungsten and being exposed on a surface of the semiconductor substrate. In another step, a sensor layer is deposited onto the surface of the semiconductor substrate, the semiconductor substrate having the integrated readout electronics and the metallization structure being exposed, when depositing the sensor layer, to a temperature which is above a maximum temperature used when generating the integrated readout electronics such that the sensor layer is connected to the integrated readout electronics via the metallization structure.

Integrated sensor structure

A sensor device including a mechanical oscillator, an excitation unit which is configured to excite the mechanical oscillator to perform a mechanical oscillation within a non-linear range at a varying excitation frequency, and an evaluation unit configured to detect a jump, arising as a result of anharmonicity, in a resonance oscillation of the mechanical oscillation of the mechanical oscillator.

Sensor device and method

Growing community of inventors

Rheurdt, Germany

Andreas Goehlich