Applied Materials Gmbh & Co Kg

Andreas Geiss

Dieter Haas

Jörg Krempel-Hesse

Hans Buchberger

Felix Brinckmann

A machine for coating a transparent substrate for the production of display screens comprises a coating chamber that has a modular design. Each of the modulesfeatures a chamber section, a first supportthat is arranged removably in or at the chamber section, and a second supportthat is arranged removably at the first support. Whereas the first supportbears the cathodes, the second supportis formed as a cover at which are arranged the pumps for producing a vacuum in the coating chamber. Carriersandcan be removed laterally from the chamber sectionto such an extent that areasaccessible to persons can be formed between the module components. In this way, the components of the machine are readily accessible, for example for maintenance purposes. Work can be done simultaneously on the cathodes and in the chamber interior.

Machine for coating a substrate, and module

A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.

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Hanau, Germany

Andreas Geiss