Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Andreas Gehner

Holger Vogt

Heinz Kuck

Gunther Hess

Peter Duerr

Martin Friedrichs

Detlef Kunze

An MMS includes a substrate, an element movable with respect to the substrate and a frame structure. A first pair of springs is arranged between the substrate and the frame structure along a first spring direction. A second pair of springs is arranged between the movable element and the frame structure along a second spring direction. The frame structure is configured to generate tensile stress in the second pair of springs at tensile stress acting in the first pair of springs.

MMS, MMS array, MEMS actuator and method for providing an MMS

An illumination device used for the direct illumination of light-sensitive ayers comprises a light source and a pattern generator. The pattern generator includes an optical Schlieren system and an active, matrix-addressable surface light generator. The Schlieren system comprises a Schlieren lens and a projection lens as well as a mirror device, which is arranged between these lenses and which directs light coming from the light source onto the surface of the surface light modulator. A filter device is used for filtering out diffracted light and for permitting undiffracted light to pass from the surface light modulator to the projection lens. The structure to be illuminated is secured in position on a displaceable positioning table. The surface light modulator is addressed such that the non-addressed surface areas thereof correspond to the projection areas of said structure which are to be illuminated.

Illumination device using a pulsed laser source a Schlieren optical

Illumination device

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Duisburg, Germany

Andreas Gehner