Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Friedrich-schiller-universitat Jena

Leica Microsystems Lithography Gmbh

Andreas Gebhardt

Christoph Damm

Stefan Risse

Thomas Peschel

Volker Guyenot

Sebastian Scheiding

Gerhard Schubert

Thomas Elster

Hans-Joachim Doering

Christoph Schenk

Ralf Steinkopf

Michael Scheiding

Matthias Beier

Wieland Stöckl

Mathias Rohde

Daniela Stumpf

Uwe D Zeitner

Christian Siebenhaar

The invention relates to a method for manufacturing a light weight optical mirror or a monolithic mirror comprising at least one cooling channel, the method comprising forming a mirror body by iteratively depositing a metallic powder in layers and applying, for each of the layers, heat at least in a subarea of this layer, thereby fusing or sintering the powder in this subarea and bonding it to a previously deposited layer, the powder remaining in an unfused state in at least one region, the method further comprising forming at least one cavity within the carrier by removing the unfused powder from said region and producing a mirror surface at a closed surface of the mirror body. The invention further relates to an optical mirror and to an optical device.

Method for manufacturing a mirror comprising at least one cavity and optical mirror

The invention relates to a method for producing an optical assembly, comprising at least two optical functional surfaces arranged in a fixed positional relationship to one another on a common supporting structure, wherein by means of a processing machine, in various process steps, at least two optical functional surfaces and at least one reference structure having a defined and measurable relative position to the optical functional surfaces are produced. The supporting structure remains rigidly connected to the processing machine until said process steps have been completed, and wherein the optical functional surfaces are then measured relative to the at least one reference structure, and any deviation from a target shape and target position is determined, after which said process steps are repeated at least once with modified actuation of the processing machine. The invention further relates to an optical device comprising an optical assembly produced in this way and to a unit for carrying out such a method.

Method for producing an optical assembly having at least two optical functional surfaces, an optical device and unit for carrying out the method

The invention is directed to electrostatic deflection systems for corpuscular beams which can be used particularly in microstructured and nanostructured applications in lithography installations or measuring equipment. According to the proposed object of the invention, the individual electrodes of a deflection system of this kind should permanently have and retain a very exact axially symmetric arrangement relative to one another. In the electrostatic deflection system according to the invention, rod-shaped electrodes are held in an axially symmetric arrangement in an inwardly hollow carrier through which a corpuscular beam can be directed. The carrier is formed of at least two, and at most four, carrier members which are connected to one another.

Electrostatic deflection system for corpuscular radiation

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Apolda, Germany

Andreas Gebhardt