Fairchild Incorporated

Fairchild Technologies Usa, Inc.

Andreas Ebert

Abdul Ghafar

Disclosed is method and apparatus for distributing a chemical over the surface of a substrate. The method includes depositing the chemical on a portion of the surface of a substrate near the center of the substrate. The method further includes controlling the temperature of the surface of a substrate so that the viscosity of the chemical is calibrated to cause the chemical to be deposited on the surface of the substrate in a substantially uniform manner.

Method for temperature controlled spin-coating systems used for making compact discs

Disclosed is a temperature controlled dispense arm for dispensing chemicals in a spin coating machine. The temperature controlled dispense arm has a cooling portion containing cooling coils and a dispense arm base having chemical dispense passages. The temperature controlled dispense arm maintains the chemical dispense passages at a cooled temperature as determined by the cooling coils located in the cooling portion.

Temperature controlled chemical dispenser

Method and apparatus for temperature controlled spin-coating systems

Disclosed is a spinning chemical applicator for spin coating a work piece. The spinning chemical applicator includes a bowl having a base region and substantially curved walls. A chuck base having a chuck plate for holding the work piece, the chuck base and the chuck plate contained within an inner region of the bowl. A bowl covering lid being mounted on a top surface of the substantially curved walls. A plurality of upper venting holes being defined in the substantially curved walls, the plurality of upper venting holes defining a venting path to the inner region of the bowl. And plurality of venting drain holes defined in the substantially curved walls at an edge location that is substantially below each of the plurality of upper venting holes. The plurality of venting drain holes providing a venting and drain path for the inner region of the bowl.

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La Grangeville, NY, United States of America

Andreas Ebert