Heraeus Quarzglas Gmbh & Co Kg

Andreas Brueckel

Martin Trommer

Hilmar Laudahn

Klaus-Uwe Badeke

Norbert Otto

The invention relates to a method for producing synthetic quartz glass by vaporizing a polyalkylsiloxane as a liquid SiOfeedstock (), converting the vaporized SiOfeedstock () into SiOparticles, separating the SiOparticles, forming a soot body () and vitrifying the soot body (). According to the invention, the vaporizing of the heated SiOfeedstock () comprises an injection phase in an expansion chamber (), in which the SiOfeedstock () is atomized into fine droplets, wherein the droplets have an average diameter of less than 5 pm, and wherein the atomizing of the droplets takes place in a preheated carrier gas stream which has a temperature of more than 180&#xb0; C.

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Bitterfeld-Wolfen, Germany

Andreas Brueckel