Lam Research Ag

Andreas Baldy

Michael Brugger

Markus Gigacher

Markus Gacher

Method and device for wet treating a defined peripheral edge-region of a wafer-shaped article having a first surface plane W, a second surface plane Wand an edge surface. The device includes a support for holding the wafer-shaped article; liquid dispensing members for dispensing liquid onto the first surface plane Wof the wafer-shaped article not facing the support and liquid guiding member connected to the support for guiding at least a part of the liquid around the edge surface of the wafer-shaped article towards the second surface plane Wof the wafer-shaped article facing the support thereby wetting at least the edge surface, wherein the liquid guiding member has the form of a ring.

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Villach, Austria

Andreas Baldy