Sensirion Ag

Sematech, Inc.

Andrea Wüest

Pascal Gerner

Markus Graf

Dominik Niederberger

Andrea Sacchetti

Dominic Boni

Vibhu Jindal

Dominic Böni

Robert Rupprecht

Martin Wirz

There is provided a portable electronic device with one or more integrated temperature sensors () for measuring an ambient temperature, a compensator () for reducing the difference between a sensor output (Ts) and the ambient temperature (Ta) with the compensator () switching depending on environmental and/or handling conditions between a plurality of compensation modes selected dependent on measurements of one or more other integrated and/or external sensors.

Portable electronic device with integrated temperature sensor

An input device for triggering a function of an electronic device comprises a humidity sensor (), and a control unit (). The control unit () analyzes a humidity signal (RH) supplied by the humidity sensor () and provides a trigger signal (C) subject to the analysis of the humidity signal (RH) for triggering the function of the electronic device (). In such way, the function of the electronic device can simply be controlled by blowing at the input device ().

Input device

Devices, tools, and methods for mitigating contamination of an optics surface used in extreme ultraviolet (EUV) applications disclosed. The method may include providing an optically reflective surface configured to reflect EUV radiation. The method may further include exposing the optically reflective surface to EUV radiation thereby generating electrons. The method may also include applying an electromagnetic field to the optically reflective surface, the electromagnetic field configured to reduce reactions initiated by the electrons on the optically reflective surface. The applied electromagnetic field may be constant or varied and also may have different biases.

Tools, methods and devices for mitigating extreme ultraviolet optics contamination

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Zurich, Switzerland

Andrea Wüest