Usound Gmbh

Andrea Rusconi Clerici

Ferruccio Bottoni

A loudspeaker arrangement for a plurality of MEMS loudspeakers for generating sound waves in the audible wavelength spectrum includes a housing, which has a sound conduction cavity and at least one sound outlet opening, and at least two MEMS loudspeakers, arranged in the interior of the housing opposite and spaced apart from each other by the sound conduction cavity. Each MEMS loudspeaker has a cavity in the region of their opposite faces. The loudspeaker arrangement includes a shielding wall for acoustically decoupling the two MEMS loudspeakers from each other. The shielding wall is arranged in the interior of the housing between the two MEMS loudspeakers such that the sound conduction cavity is subdivided into a first and a second a cavity region respectively associated with one of the two MEMS loudspeakers.

Loudspeaker arrangement

A MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength spectrum includes a membrane carrier, a membrane that is connected in its edge area to the membrane carrier, and may vibrate along a z-axis with respect to the membrane carrier, and a stopper mechanism, which limits the vibrations of the membrane in at least one direction. The stopper mechanism includes at least one reinforcing element, which is arranged on one side of the membrane, and an end stop opposite to the reinforcing element. In a neutral position of the membrane, the end stop is spaced at a distance from the membrane and against which the reinforcing element abuts at a maximum deflection. A sound transducer arrangement includes such a MEMS sound transducer.

MEMS acoustic transducer, and acoustic transducer assembly having a stopper mechanism

The invention relates to a MEMS loudspeaker () for generating sound waves in the audible wavelength spectrum, with a carrier substrate () that features a substrate cavity () with two substrate openings (), which are formed on two opposite sides of the carrier substrate (), an actuator structure (), in particular a piezoelectric actuator structure, which is arranged in the area of one of the two substrate openings () and is connected to the carrier substrate () in its edge area, and a membrane () anchored in its edge area, which, by means of the actuator structure (), can be set into vibration for generating sound waves. In accordance with the invention, in a cross-sectional view of the MEMS loudspeaker (), the membrane () is spaced at a distance from the actuator structure (), such that an intermediate cavity () is formed between these two. Furthermore, the MEMS loudspeaker () features a coupling element () arranged in the intermediate cavity (), which connects the actuator structure () to the membrane () and may vibrate with this with respect to the carrier substrate ().

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Hamburg, Germany

Andrea Rusconi Clerici