Technische Universiteit Eindhoven

Mantispectra B.v.

Andrea Fiore

Tianran Liu

Leonardo Midolo

Francesco Maria Pagliano

Maurangelo Petruzzella

Kaylee Doranne Hakkel

Robertus Willebrordus Van Der Heijden

Zarko Zobenica

A multi-pixel spectroscopy sensor for spectral analysis of a sample under test including an array of pixel elements generating a dataset including a plurality of data values corresponding to the pixel elements upon illumination of the sample by a light source. Each of the pixel elements including a stack of layers including first and second reflective structures, a phase tuning element, a detector element, and contact elements. The sensor further includes a read-out circuit connected to each of the contact elements for simultaneous read-out of a plurality of photocurrents for generating and outputting the dataset for the spectral analysis of the sample under test. The phase tuning element of each of the pixel elements is configured for a different wavelength response of the light and each photodetector of the pixel elements is comprised of a semiconductor material.

Multi-pixel spectral sensor

A double membrane microspectrometer is provided that includes a first membrane having a first and second doped semiconductor layers, and a first intrinsic layer is disposed between the first and second layers, where the first intrinsic layer includes an optically absorbing material, a first pattern of through holes are disposed perpendicular through the first membrane having lateral support arms, a second membrane having a third doped layer and a fourth layer is an intrinsic layer or a doped layer, where the second membrane includes a second pattern of through holes, where the first membrane is separated from the second membrane by an insulating bridge layer and is supported above the second membrane by lateral support arms, where an absorption spectrum of the absorbing material is dependent on the separation distance of the membranes, electrodes are disposed on the first layer, the second layer, and the third layer operate the separation.

Integrated spectrometer and optomechanical sensor

Growing community of inventors

Nuenen, Netherlands

Andrea Fiore