Koninklijke Philips Corporation N.V.

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek

Andre Yaroshenko

Gereon Vogtmeier

Johannes Wilhelmus Maria Jacobs

Sandeep Unnikrishnan

Dorothee Christine Hermes

Bo Liu

The invention relates to a method of manufacturing a structured grating, a corresponding structured grating component () and an imaging system. The method comprising the steps of: providing () a catalyst () on a substrate (), the catalyst () having a grating pattern; growing () nanostructures () on the catalyst () so as to form walls () and trenches () based on the grating pattern; and filling () the trenches () between the walls () of nanostructures () using an X-ray absorbing material (). The invention provides an improved method for manufacturing a structured grating and such structured grating component (), which is particularly suitable for dark-field X-ray imaging or phase-contrast imaging.

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Garching, Germany

Andre Yaroshenko