Ushio Denki Kabushiki Kaisha

Andre Matthias Prinz

Dominik Marcel Vaudrevange

Ralf Gordon Conrads

Gota Niimi

Maghiel Jan Kole

Wilhelmus V J Van Nunspeet

Johannes W J L Cuijpers

An arrangements and methods for cooling a plasma-based radiation source having a revolving element which is to be cooled, particularly for application in EUV radiation sources, is disclosed. The revolving element is immersed in the metal coolant in a first vessel of a primary cooling circuit, and a secondary cooling circuit with a cooling liquid evaporating at the desired operating temperature of the metal coolant has a control unit for controlling at least one atomizing arrangement in a differentiated manner and for selectively controlling a heater in case the determined temperature falls below a minimum operating temperature of the metal coolant. The at least one atomizing arrangement in a cooling section selectively sprays individual wall regions of the first vessel with the cooling liquid depending on the determined temperature of the metal coolant.

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Dueren, Germany

Andre Matthias Prinz