Kla Tencor Corporation

Anatoly A Vasiliev

Amnon Manassen

Andrei V Shchegrov

Mark Ghinovker

Andrew V Hill

Ilya Bezel

Daniel Kandel

Anatoly Shchemelinin

Ohad Bachar

Lawrence D Rotter

Alexander Svizher

Derrick A Shaughnessy

Gregory Brady

Ilan Sela

Avi Abramov

Muzammil A Arain

Moshe Markowitz

Yaron Ish-Shalom

Oleg Shulepov

Maxim Khokhlov

Oleg Tsibulevsky

James Andrew Allen

A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Systems for providing illumination in optical metrology

The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

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Sunnyvale, CA, United States of America

Anatoly A Vasiliev