Beijing Voyager Technology Co., Ltd.

Anan Pan

Henghui Jiang

Youmin Wang

Ming-hui Wu

Yue Lu

Lingkai Kong

Qin Zhou

Sae Won Lee

In one example, a Light Detection and Ranging (LiDAR) module is provided. The LiDAR module comprises a semiconductor integrated circuit comprising a micro-electromechanical system (MEMS) formed on a surface of a silicon substrate, and a controller, the MEMS comprising a polygon assembly, the polygon assembly comprising: a polygon; a support structure connected to the polygon and forming a stack with the polygon along a rotation axis; a plurality of anchors formed on the surface of the substrate; and a plurality of actuators, each actuator of the plurality of actuators being connected between the support structure and an anchor of the plurality of actuators. The controller is configured apply a voltage across each actuator of the plurality of actuators, wherein the voltage causes each actuator to exert a torque on the support structure to rotate the polygon around the rotation axis by a target rotation angle.

Solid-state light steering system

A LiDAR system may include an optical component module including a housing including a plurality of slots and a plurality of posts. A first spring may be coupled to a first post at a first radial orientation so that the first spring extends into a first slot of the plurality of slots. A second identical spring may be coupled to a second post in a second radial orientation, different than the first radial orientation, so that the second spring extends into a second slot of the plurality of slots. A first optical component may be positioned in the first slot so that the first spring exerts a first clamping force retaining the first optical component within the first slot, and a second optical component may be positioned in the second slot so that the second spring exerts a second clamping force retaining the second optical component within the second slot.

Methods and apparatuses for improved optical component retention and alignment in a LiDAR system

Embodiments of the disclosure provide an interface module for a LiDAR assembly. The interface module includes a printed circuit board (PCB) and a first connector interface disposed on the PCB. The first connector interface is configured to be connectable to a laser emitter of the LiDAR assembly. The interface module further includes a second connector interface disposed on the PCB and a third connector interface disposed on the PCB. The second connector interface is configured to be connectable to a receiver of the LiDAR assembly and the third connector interface is configured to be connectable to a control module configured to control the operation of the laser emitter and the receiver. The interface module also includes a bracket where the PCB is affixed to. The interface module is positioned to a lateral face of the LiDAR assembly through the bracket.

LiDAR assembly with modularized components

Embodiments of the disclosure provide an integrated transmitter-receiver module for a LiDAR assembly. The integrated transmitter-receiver module includes a laser emitter configured to emit optical signals to an environment surrounding the LiDAR assembly. The integrated transmitter-receiver module also includes a receiver configured to detect returned optical signals from the environment. The laser emitter and the receiver are pre-aligned to focus the returned optical signal on one or more detectors of the receiver and are disposed on a shared base wherein the shared base is configured to assemble the integrated transmitter-receiver module to the LiDAR assembly.

Embodiments of the disclosure provide a control system for a LiDAR assembly. The control system includes a control module affixed on a printed circuit board (PCB), configured to control a transmitter and a receiver of the LiDAR assembly to emit and receive optical signals. The control system also includes an interface module affixed on a first bracket, configured to operatively couple the control module to the transmitter and the receiver. The control module and the interface module are configured to be positioned at predetermined positions of the LiDAR assembly through the PCB and the first bracket respectively.

Embodiments of the disclosure provide a LiDAR assembly with a one-piece frame. The LiDAR assembly includes a plurality of modularized components configured to sense an environment surrounding the LiDAR assembly. The LiDAR assembly also includes the one-piece frame including a base, a plurality of vertical beams supported by the base, and a plurality of horizontal beams supported by the vertical beams. The base, the vertical beams, and the horizontal beams are integrally formed without mechanical connections therebetween. The vertical beams and the horizontal beams are equipped with positioning mechanisms configured to position the plurality of modularized components at predetermined positions of the LiDAR assembly.

Lidar assembly with modularized components

A micro-electromechanical system (MEMS) apparatus has an array of micro-mirrors and a control circuit for rotating the micro-mirrors synchronously at a resonant frequency. The MEMS apparatus includes elements with different Coefficients of Thermal Expansion (CTE) for a die substrate coupled to the array of micro-mirrors, a die attach layer, a chip package coupled to the die substrate and a printed circuit board coupled to the chip package. The apparatus provides mechanisms for reducing changes in the resonant frequency due to changes in temperature causing stresses due to a mismatch between the CTE of the different elements. A thermoelectric cooler is used, along with the optional addition of heating resistors, additional pins to distribute stress, and the widened vias allowing room for the pins to bend and relieve stress on the chip package.

Thermal control of MEMS mirrors to limit resonant frequency shift

Embodiments of the disclosure provide a LiDAR assembly with modularized components. The LiDAR assembly includes an integrated transmitter-receiver module assembled on a first bracket, configured to emit optical signals to an environment surrounding the LiDAR assembly and detect returned optical signals from the environment. The LiDAR assembly also includes a control module affixed on a PCB, configured to control the integrated transmitter-receiver module to emit the optical signals. The LiDAR assembly further includes an interface module affixed on a second bracket, configured to operatively couple the integrated transmitter-receiver module and the control module. The LiDAR assembly yet further includes a frame configured to position the integrated transmitter-receiver module, the control module, and the interface module at predetermined positions of the LiDAR assembly through the first bracket, the PCB, and the second bracket respectively. The integrated transmitter-receiver module is configured to be assembled to or disassembled from the frame through guideways.

Light detection and ranging (LIDAR) component

An optical micro-electromechanical system (MEMS) system is disclosed. The optical MEMS system includes a printed circuit board (PCB), and a MEMS optical integrated circuit (IC) package mounted to the PCB. The IC package includes a MEMS optical die, and a plurality of leads electrically and mechanically connected to the MEMS optical die and to the PCB. The optical MEMS system also includes one or more elastomeric grommets contacting one or more of the leads, where the grommets are configured to absorb mechanical vibration energy from the contacted leads.

MEMS package with shock and vibration protection

In one example, a method of fabricating a polygon assembly of a Light Detection and Ranging (LiDAR) module is provided. The method comprises: forming, on a backside surface of a first silicon-on-insulator (SOI) substrate, a multi-facet polygon of the polygon assembly; forming, on a frontside surface of the first SOI substrate, an axial portion of a support structure of the polygon assembly, the axial portion forming a stack with the polygon along a rotation axis; forming, on a frontside surface of a second SOI substrate, a plurality of radial portions of the support structure; forming, on a backside surface of the second SOI substrate, a cavity that encircles the plurality of radial portions; and bonding, based on a wafer bonding operation, the axial portion to the plurality of radial portions to form the polygon assembly.

Method of fabricating solid-state light steering system

A MEMS chip package is provided with a removable cover to allow non-destructive testing. The MEMS package has a container (with walls and a bottom) and a cover. The cover has a glass pane, and is secured to the MEMS package with an elastomeric gasket mounted between the walls of the MEMS package and the cover. A number of attachment mechanisms secure the cover to the MEMS package.

Detachable MEMS package top cover

A light detection and ranging transmitter includes an optical scanner assembly and an extending arm for positioning a light source and a light beam collimator in a coaxial configuration. The optical scanner assembly include a scanner board for installing an optical scanner, a mechanical mount, a first set of adjustable connectors coupling the scanner board to the mechanical mount, and a first set of elastic members between the mechanical mount and the scanner board and sleeved on the first set of adjustable connectors. The LiDAR transmitter includes a second set of adjustable connectors coupling the mechanical mount to the extending arm such that the optical scanner can receive a light beam emitted by the light source and collimated by the light beam collimator. The LiDAR transmitter includes a second set of elastic members between the mechanical mount and the extending arm and sleeved on the second set of adjustable connectors.

Kinematic mount for active, multi-degree-of-freedom alignment in a LiDAR system

A light detection and ranging system include a chassis and a galvo mirror assembly. The galvo mirror assembly includes a mirror holder including a handle and a galvo mirror for receiving and reflecting a light beam; a galvo mirror mount detachably mounted on the chassis and including a recess for receiving the handle of the mirror holder; two elastic members coupled to the handle of the mirror holder and the galvo mirror mount; two set screws in contact with the handle of the mirror holder and at least partially in the galvo mirror mount; and a galvo motor in the galvo mirror mount and configured to rotate the mirror holder. The two set screws are individually adjustable to change a compression force applied to at least one of the two elastic members and a tilt angle of the mirror holder (and the galvo mirror) with respect to a vertical direction.

Growing community of inventors

Fremont, CA, United States of America

Anan Pan