Carl Zeiss Industrielle Messtechnik Gmbh

Ana Carolina Mayr Adam

Stephan Rieger

Florian Mayer

Günter Haas

Annett Froewis

Birgit Huber

Thomas Guth

Annett Fröwis

A method for generating a resultant test plan for testing a measurement object includes generating at least one data record by measuring the measurement object. The method includes assigning at least part of the measurement object to at least one object class based on the at least one data record. The method includes determining a test plan assigned to the at least one object class as an object-class-specific test plan. The method includes determining the resultant test plan based on the object-class-specific test plan. The assignment of the at least part of the measurement object to the at least one object class is independent of dimensions.

Method and apparatus for automated generation of a test plan to measure a measurement object

A method for generating a test plan for testing a measurement object includes obtaining a data record representing the measurement object. The method includes setting a reference structure based on the data. The method includes assigning at least one reference structure-specific test feature to the reference structure. A test is carried out based on data for the data record representing the measurement object as to whether structures that are similar to or the same as the reference structure are present. The reference structure-specific test feature is assigned to each similar or same structure as the structure-specific test feature. The method includes generating the test plan to include the structure-specific test features.

Method and apparatus for automated test plan generation to measure a measurement object

A computer-implemented method automatically produces a test plan for measuring a measured object. The method includes obtaining a desired dataset of the measured object. The method includes providing a starting pattern. The providing comprises producing a division. The producing the division comprises applying at least one division function. The division has a plurality of division indices. The method includes producing a target pattern by generating a comparison between the desired dataset and the division. At least one division index is adapted in response to a deviation of the division from the desired dataset. The method includes creating at least one element with at least one piece of pattern information in the test plan in accordance with the target pattern.

Computer-implemented method for automatically producing metrology test plan

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Aalen, Germany

Ana Carolina Mayr Adam